Low-energy electron interactions with chromium hexacarbonyl Cr(CO)6

J. Khreis; J. Ameixa; M. Neustetter; J. Reitshammer; F. Ferreira Da Silva; S. Denifl

doi:10.1088/1742-6596/875/7/062003

Low-energy electron interactions with chromium hexacarbonyl Cr(CO)₆

J. Khreis, J. Ameixa, M. Neustetter, J. Reitshammer, F. Ferreira Da Silva, S. Denifl

Research output: Contribution to journal › Conference article › peer-review

Abstract

Positive and negative ion formation upon low energy electron interaction with chromium hexacarbonyl precursor molecules used in FEBID applications was studied. The obtained results revealed a noteworthy different fragmentation pattern compared to other precursors. This work contributes to the development and the possible production concerning highly pure nanoscale structures.

Original language	English
Article number	062003
Journal	Journal of Physics: Conference Series
Volume	875
Issue number	7
DOIs	https://doi.org/10.1088/1742-6596/875/7/062003
Publication status	Published - 2017
Event	30th International Conference on Photonic, Electronic, and Atomic Collisions (ICPEAC 2017) - Cairns, Australia Duration: 26 Jul 2017 → 1 Aug 2017 Conference number: 30th

Keywords

BEAM-INDUCED DEPOSITION

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http://iopscience.iop.org/article/10.1088/1742-6596/875/7/062003/pdfLicence: CC BY

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title = "Low-energy electron interactions with chromium hexacarbonyl Cr(CO)6",

abstract = "Positive and negative ion formation upon low energy electron interaction with chromium hexacarbonyl precursor molecules used in FEBID applications was studied. The obtained results revealed a noteworthy different fragmentation pattern compared to other precursors. This work contributes to the development and the possible production concerning highly pure nanoscale structures.",

keywords = "BEAM-INDUCED DEPOSITION",

author = "J. Khreis and J. Ameixa and M. Neustetter and J. Reitshammer and {Ferreira Da Silva}, F. and S. Denifl",

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AU - Khreis, J.

AU - Ameixa, J.

AU - Neustetter, M.

AU - Reitshammer, J.

AU - Ferreira Da Silva, F.

AU - Denifl, S.

N1 - Conference code: 30th

PY - 2017

Y1 - 2017

N2 - Positive and negative ion formation upon low energy electron interaction with chromium hexacarbonyl precursor molecules used in FEBID applications was studied. The obtained results revealed a noteworthy different fragmentation pattern compared to other precursors. This work contributes to the development and the possible production concerning highly pure nanoscale structures.

AB - Positive and negative ion formation upon low energy electron interaction with chromium hexacarbonyl precursor molecules used in FEBID applications was studied. The obtained results revealed a noteworthy different fragmentation pattern compared to other precursors. This work contributes to the development and the possible production concerning highly pure nanoscale structures.

KW - BEAM-INDUCED DEPOSITION

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U2 - 10.1088/1742-6596/875/7/062003

DO - 10.1088/1742-6596/875/7/062003

M3 - Conference article

AN - SCOPUS:85041335289

SN - 1742-6588

VL - 875

JO - Journal of Physics: Conference Series

JF - Journal of Physics: Conference Series

IS - 7

M1 - 062003

T2 - 30th International Conference on Photonic, Electronic, and Atomic Collisions (ICPEAC 2017)

Y2 - 26 July 2017 through 1 August 2017

ER -

Low-energy electron interactions with chromium hexacarbonyl Cr(CO)₆

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