Low-energy electron interactions with chromium hexacarbonyl Cr(CO)6

J. Khreis, J. Ameixa, M. Neustetter, J. Reitshammer, F. Ferreira Da Silva, S. Denifl

Research output: Contribution to journalArticle

Abstract

Positive and negative ion formation upon low energy electron interaction with chromium hexacarbonyl precursor molecules used in FEBID applications was studied. The obtained results revealed a noteworthy different fragmentation pattern compared to other precursors. This work contributes to the development and the possible production concerning highly pure nanoscale structures.

Original languageEnglish
Article number062003
JournalJournal of Physics: Conference Series
Volume875
Issue number7
DOIs
Publication statusPublished - 2017

Keywords

  • BEAM-INDUCED DEPOSITION

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