Linear thin-film position-sensitive detector (LTFPSD) for 3D measurements

Rodrigo Martins, Guilherme Lavareda, Elvira Fortunato, Fernando Soares, Luis Fernandes, Luis Ferreira

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Citation (Scopus)

Abstract

A linear array thin film position sensitive detector (LTFPSD) based on hydrogenated amorphous silicon (a-Si:H) is proposed for the first time, taking advantage of the optical properties presented by a-Si:H devices we have developed a LTFPSD with 128 integrated elements able to be used in 3-D inspections/measurements. Each element consists on a one-dimensional LTFPSD, based on a p.i.n. diode produced in a conventional PECVD system, where the doped layers are coated with thin resistive layers to establish the required device equipotentials. By proper incorporation of the LTFPSD into an optical inspection camera it is possible to acquire information about an object/surface, through the optical cross-section method. The main advantages of this system, when compared with the conventional CCDs, are the low complexity of hardware and software used and that the information can be continuously processed (analogue detection).

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
PublisherSociety of Photo-Optical Instrumentation Engineers
Pages148-158
Number of pages11
Volume2415
ISBN (Print)0819417629
Publication statusPublished - 1995
EventCharge-Coupled Devices and Solid State Optical Sensors V - San Jose, CA, USA
Duration: 6 Feb 19957 Feb 1995

Conference

ConferenceCharge-Coupled Devices and Solid State Optical Sensors V
CitySan Jose, CA, USA
Period6/02/957/02/95

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