Large area flexible amorphous silicon position sensitive detectors

E. M C Fortunato, D. Brida, I. M M Ferreira, H. M B Águas, P. Nunes, A. Cabrita, F. Giuliani, Y. Nunes, M. J P Maneira, R. F P Martins

Research output: Contribution to journalArticle

Abstract

Large area thin film position sensitive detectors based on amorphous silicon technology have been prepared on polyimide substrates using the conventional plasma enhanced chemical vapour deposition technique. The sensors have been characterised by spectral response, illuminated I-V characteristics and position detectability measurements. The obtained one dimensional position sensors with 5 mm wide and 60 mm long present a maximum spectral response at 600 nm, an open circuit voltage of 0.6 V° and a position detectability with a correlation of 0.9989 associated to a standard deviation of 1 × 10-2, comparable to those ones produced on glass substrates. The surface of the sensors at each stage of fabrication was investigated by Atomic Force Microscopy.

Original languageEnglish
Pages (from-to)A1271-A1276
Number of pages6
JournalMRS Proceedings
Volume609
Publication statusPublished - 2000

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