ITO thin films deposited by RTE on flexible transparent substrates

C. Nunes de Carvalho, A. Luis, G. Lavareda, A. Amaral, P. Brogueira, M. H. Godinho

Research output: Contribution to journalConference articlepeer-review

11 Citations (Scopus)

Abstract

Indium-tin oxide (ITO) thin films were successfully deposited onto transparent flexible substrates of hydroxypropylcellulose (HPC) cross-linked with 1,4-di-isocyanatobutane (BDI). The effect of O2 plasma exposure on the transmittance and sheet resistance of the ITO coated flexible substrates has been studied. Atomic force microscopy (AFM) shows that these type of substrates have a large surface roughness (4.8 nm) which originates high values in the diffuse transmittance. The best properties of the resulting ITO films on flexible substrates are an average total transmittance in the visible region of about 80% and a sheet resistance of about 4 × 104 Ω/sq.

Original languageEnglish
Pages (from-to)287-290
Number of pages4
JournalOptical Materials
Volume17
Issue number1-2
DOIs
Publication statusPublished - Jun 2001
EventSpring Conference of the E-MRS/IUMRS/ICEM - Strasbourg, France
Duration: 30 May 20002 Jun 2000

Keywords

  • Atomic force microscopy (AFM)
  • Cellulose derivative substrates
  • Indium tin oxide (ITO)
  • Oxygen plasma
  • Reactive thermal evaporation (RTE)
  • Transmittance

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