TY - JOUR
T1 - ITO coated flexible transparent substrates for liquid crystal based devices
AU - Luis, A.
AU - Nunes De Carvalho, C.
AU - Lavareda, G.
AU - Amaral, Ana
AU - Brogueira, Pedro
AU - Godinho, M. H.
N1 - This work was supported by “Fundação para a Ciência e Tecnologia” through a Pluriannual Contract with CFM (IST) and by a PRAXIS XXI project, Ref. 3/3.1/CEG/2620/95.
PY - 2002/1/1
Y1 - 2002/1/1
N2 - Indium tin oxide (ITO) thin films were successfully deposited onto transparent flexible substrates of hydroxypropylcellulose crosslinked with 1,4-Di-isocyanatobutane (BDI). According to our results, flexible substrates produced with a sol/gel fraction of 0.16 can reach, under vacuum conditions, a working temperature, Ts≈150°C. The effect of O2 plasma exposure on the transmittance and sheet resistance of the ITO coated flexible substrates has been studied. Atomic force microscopy shows that these type of substrates have a large surface roughness (4.8nm) which originates high values in the diffuse transmittance. A memory of the large surface features of the flexible substrate is retained in the growing of ITO thin film. The best properties of the resulting ITO coated flexible substrates are an average total transmittance in the visible region of about 80% and a sheet resistance of about 4 × 104Ω/sq.
AB - Indium tin oxide (ITO) thin films were successfully deposited onto transparent flexible substrates of hydroxypropylcellulose crosslinked with 1,4-Di-isocyanatobutane (BDI). According to our results, flexible substrates produced with a sol/gel fraction of 0.16 can reach, under vacuum conditions, a working temperature, Ts≈150°C. The effect of O2 plasma exposure on the transmittance and sheet resistance of the ITO coated flexible substrates has been studied. Atomic force microscopy shows that these type of substrates have a large surface roughness (4.8nm) which originates high values in the diffuse transmittance. A memory of the large surface features of the flexible substrate is retained in the growing of ITO thin film. The best properties of the resulting ITO coated flexible substrates are an average total transmittance in the visible region of about 80% and a sheet resistance of about 4 × 104Ω/sq.
KW - Atomic force microscopy (AFM)
KW - Cellulose derivative substrates
KW - Indium tin oxide (ITO)
KW - Oxygen plasma
KW - Reactive thermal evaporation (RTE)
KW - Transmittance
UR - http://www.scopus.com/inward/record.url?scp=0036134714&partnerID=8YFLogxK
U2 - 10.1016/S0042-207X(01)00305-0
DO - 10.1016/S0042-207X(01)00305-0
M3 - Conference article
AN - SCOPUS:0036134714
SN - 0042-207X
VL - 64
SP - 475
EP - 479
JO - Vacuum
JF - Vacuum
IS - 3-4
T2 - 4th Iberian Vacuum Meeting, IVM-4
Y2 - 13 July 2000 through 15 July 2000
ER -