ITO coated flexible transparent substrates for liquid crystal based devices

A. Luis, C. Nunes De Carvalho, G. Lavareda, Ana Amaral, Pedro Brogueira, M. H. Godinho

Research output: Contribution to journalConference articlepeer-review

27 Citations (Scopus)


Indium tin oxide (ITO) thin films were successfully deposited onto transparent flexible substrates of hydroxypropylcellulose crosslinked with 1,4-Di-isocyanatobutane (BDI). According to our results, flexible substrates produced with a sol/gel fraction of 0.16 can reach, under vacuum conditions, a working temperature, Ts≈150°C. The effect of O2 plasma exposure on the transmittance and sheet resistance of the ITO coated flexible substrates has been studied. Atomic force microscopy shows that these type of substrates have a large surface roughness (4.8nm) which originates high values in the diffuse transmittance. A memory of the large surface features of the flexible substrate is retained in the growing of ITO thin film. The best properties of the resulting ITO coated flexible substrates are an average total transmittance in the visible region of about 80% and a sheet resistance of about 4 × 104Ω/sq.

Original languageEnglish
Pages (from-to)475-479
Number of pages5
Issue number3-4
Publication statusPublished - 1 Jan 2002
Event4th Iberian Vacuum Meeting, IVM-4 - Salamanca, Spain
Duration: 13 Jul 200015 Jul 2000


  • Atomic force microscopy (AFM)
  • Cellulose derivative substrates
  • Indium tin oxide (ITO)
  • Oxygen plasma
  • Reactive thermal evaporation (RTE)
  • Transmittance


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