Influence of the semiconductor thickness on the electrical properties of transparent TFTs based on indium zinc oxide

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Multicomponent amorphous oxides are starting to emerge as a class of appealing semiconductor materials for application in transparent electronics. In this work, a high performance bottom-gate n-type transparent thin-film transistors are reported, being the discussion primarily focused on the influence of the indium zinc oxide active layer thickness on the properties of the devices. For this purpose, transparent transistors with active layer thicknesses ranging from 15 nm to 60 nm were produced at room temperature using rf magnetron sputtering. Optical transmittance data in the visible range reveals average transmittance higher than 80%, including the glass substrate. The devices work in the enhancement mode and exhibit excellent saturation drain currents. On–off ratios above 107 are achieved, but this value tends to be lower for devices with thicker semiconductor films, as a result of the decrease in the resistance of the channel region with increasing thickness. Channel mobilities are also quite respectable, with some devices presenting values around 40 cm2/V s, even without any annealing or other post-deposition improvement processes. Concerning the evolution of threshold voltage with the thickness, this work shows that it increases from about 3 V in thicker films up to about 10 V in the thinnest ones. The interesting electrical properties obtained and the versatility arising from the fact that it is possible to modify them changing only the thickness of the semiconductor makes this new transparent transistors quite promising for future transparent ICs.
Original languageEnglish
Pages (from-to)1749-1752
Number of pages4
JournalJournal of Non-Crystalline Solids
Issue number9-20 SPEC. ISS.
Publication statusPublished - 15 Jun 2006


  • Amorphous semiconductors
  • Thin film transistors
  • Sputtering

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