Influence of the reactive N-2 gas flow on the properties of rf-sputtered ZnO thin films

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@article{2f38ba1818f344a4bdc1b7ed21d2da1b,

title = "Influence of the reactive N-2 gas flow on the properties of rf-sputtered ZnO thin films",

author = "{DCM Group Author} and Fortunato, {Elvira Maria Correia} and Martins, {Rodrigo Ferr{\~a}o de Paiva}",

year = "2007",

month = jan,

day = "1",

doi = "10.1016/j.tsf2007.03.062",

language = "Unknown",

volume = "515",

pages = "8780--8784",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier B.V.",

number = "24",

}

TY - JOUR

T1 - Influence of the reactive N-2 gas flow on the properties of rf-sputtered ZnO thin films

AU - DCM Group Author

AU - Fortunato, Elvira Maria Correia

AU - Martins, Rodrigo Ferrão de Paiva

PY - 2007/1/1

Y1 - 2007/1/1

U2 - 10.1016/j.tsf2007.03.062

DO - 10.1016/j.tsf2007.03.062

M3 - Article

VL - 515

SP - 8780

EP - 8784

JO - Thin Solid Films

JF - Thin Solid Films

SN - 0040-6090

IS - 24

ER -