@inproceedings{6698624b8b9549fdb90f58d5b0203267,
title = "Influence of the rapid thermal annealing on the properties of thin a-Si films",
author = "Fortunato, {Elvira Maria Correia} and Leandro Raniero and Martins, {Rodrigo Ferr{\~a}o de Paiva}",
year = "2003",
month = apr,
day = "16",
doi = "10.4028/www.scientific.net/MSF.455-456.108",
language = "English",
volume = "455-456",
pages = "108--111",
booktitle = "Materials Science Forum",
note = "Advanced Materials Forum II ; Conference date: 01-01-2004",
}