Influence of the rapid thermal annealing on the properties of thin a-Si films

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Materials Science Forum
Pages	108-111
Number of pages	4
Volume	455-456
DOIs	https://doi.org/10.4028/www.scientific.net/MSF.455-456.108
Publication status	Published - 16 Apr 2003
Event	Advanced Materials Forum II - Duration: 1 Jan 2004 → …

Conference	Advanced Materials Forum II
Period	1/01/04 → …

Cite this

@inproceedings{6698624b8b9549fdb90f58d5b0203267,

title = "Influence of the rapid thermal annealing on the properties of thin a-Si films",

author = "Fortunato, {Elvira Maria Correia} and Leandro Raniero and Martins, {Rodrigo Ferr{\~a}o de Paiva}",

year = "2003",

month = apr,

day = "16",

doi = "10.4028/www.scientific.net/MSF.455-456.108",

language = "English",

volume = "455-456",

pages = "108--111",

booktitle = "Materials Science Forum",

note = "Advanced Materials Forum II ; Conference date: 01-01-2004",

}

TY - GEN

T1 - Influence of the rapid thermal annealing on the properties of thin a-Si films

AU - Fortunato, Elvira Maria Correia

AU - Raniero, Leandro

AU - Martins, Rodrigo Ferrão de Paiva

PY - 2003/4/16

Y1 - 2003/4/16

U2 - 10.4028/www.scientific.net/MSF.455-456.108

DO - 10.4028/www.scientific.net/MSF.455-456.108

M3 - Conference contribution

VL - 455-456

SP - 108

EP - 111

BT - Materials Science Forum

T2 - Advanced Materials Forum II

Y2 - 1 January 2004

ER -