Influence of the rapid thermal annealing on the properties of thin a-Si films

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationMaterials Science Forum
Pages108-111
Number of pages4
Volume455-456
DOIs
Publication statusPublished - 16 Apr 2003
EventAdvanced Materials Forum II -
Duration: 1 Jan 2004 → …

Conference

ConferenceAdvanced Materials Forum II
Period1/01/04 → …

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