Influence of the post-treatment on the properties of ZnO thin films

Elvira Maria Correia Fortunato; Rodrigo Ferrão de Paiva Martins; P Nunes

doi:10.1016/S0040-6090(00)01577-7

Influence of the post-treatment on the properties of ZnO thin films

Elvira Maria Correia Fortunato, Rodrigo Ferrão de Paiva Martins, P Nunes

Research output: Contribution to journal › Article › peer-review

192 Citations (Scopus)

Abstract

In this work a study of the influence of the annealing treatment (atmosphere and temperature) on the properties of zinc oxide thin films (intrinsic and doped with indium and aluminum) prepared by spray pyrolysis is presented. The result shows that the type of atmosphere (reduction or oxidant) has an important role in the changes observed in the structural, electrical and optical properties of the ZnO thin films. The ZnO thin film doped with indium, presents the lowest resistivity (rho = 5.8 x 10(-3) Omega cm) associated to a high transmittance (T = 86%), characteristics required for application on optoelectronic devices. (C) 2001 Elsevier Science B.V. All rights reserved.

Original language	English
Pages (from-to)	277-280
Journal	Thin Solid Films
Volume	383
Issue number	1-2
DOIs	https://doi.org/10.1016/S0040-6090(00)01577-7
Publication status	Published - 1 Jan 2001

Keywords

Zinc oxide
Spray pyrolysis
Annealing treatment
Thin films

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10.1016/S0040-6090(00)01577-7

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title = "Influence of the post-treatment on the properties of ZnO thin films",

abstract = "In this work a study of the influence of the annealing treatment (atmosphere and temperature) on the properties of zinc oxide thin films (intrinsic and doped with indium and aluminum) prepared by spray pyrolysis is presented. The result shows that the type of atmosphere (reduction or oxidant) has an important role in the changes observed in the structural, electrical and optical properties of the ZnO thin films. The ZnO thin film doped with indium, presents the lowest resistivity (rho = 5.8 x 10(-3) Omega cm) associated to a high transmittance (T = 86%), characteristics required for application on optoelectronic devices. (C) 2001 Elsevier Science B.V. All rights reserved.",

keywords = "Zinc oxide, Spray pyrolysis, Annealing treatment, Thin films",

author = "Fortunato, {Elvira Maria Correia} and Martins, {Rodrigo Ferr{\~a}o de Paiva} and P Nunes",

year = "2001",

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doi = "10.1016/S0040-6090(00)01577-7",

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T1 - Influence of the post-treatment on the properties of ZnO thin films

AU - Fortunato, Elvira Maria Correia

AU - Martins, Rodrigo Ferrão de Paiva

AU - Nunes, P

PY - 2001/1/1

Y1 - 2001/1/1

N2 - In this work a study of the influence of the annealing treatment (atmosphere and temperature) on the properties of zinc oxide thin films (intrinsic and doped with indium and aluminum) prepared by spray pyrolysis is presented. The result shows that the type of atmosphere (reduction or oxidant) has an important role in the changes observed in the structural, electrical and optical properties of the ZnO thin films. The ZnO thin film doped with indium, presents the lowest resistivity (rho = 5.8 x 10(-3) Omega cm) associated to a high transmittance (T = 86%), characteristics required for application on optoelectronic devices. (C) 2001 Elsevier Science B.V. All rights reserved.

AB - In this work a study of the influence of the annealing treatment (atmosphere and temperature) on the properties of zinc oxide thin films (intrinsic and doped with indium and aluminum) prepared by spray pyrolysis is presented. The result shows that the type of atmosphere (reduction or oxidant) has an important role in the changes observed in the structural, electrical and optical properties of the ZnO thin films. The ZnO thin film doped with indium, presents the lowest resistivity (rho = 5.8 x 10(-3) Omega cm) associated to a high transmittance (T = 86%), characteristics required for application on optoelectronic devices. (C) 2001 Elsevier Science B.V. All rights reserved.

KW - Zinc oxide

KW - Spray pyrolysis

KW - Annealing treatment

KW - Thin films

U2 - 10.1016/S0040-6090(00)01577-7

DO - 10.1016/S0040-6090(00)01577-7

M3 - Article

SN - 0040-6090

VL - 383

SP - 277

EP - 280

JO - Thin Solid Films

JF - Thin Solid Films

IS - 1-2

ER -

Influence of the post-treatment on the properties of ZnO thin films

Abstract

Keywords

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