Influence of the post-treatment on the properties of ZnO thin films

Research output: Contribution to journalArticlepeer-review

182 Citations (Scopus)

Abstract

In this work a study of the influence of the annealing treatment (atmosphere and temperature) on the properties of zinc oxide thin films (intrinsic and doped with indium and aluminum) prepared by spray pyrolysis is presented. The result shows that the type of atmosphere (reduction or oxidant) has an important role in the changes observed in the structural, electrical and optical properties of the ZnO thin films. The ZnO thin film doped with indium, presents the lowest resistivity (rho = 5.8 x 10(-3) Omega cm) associated to a high transmittance (T = 86%), characteristics required for application on optoelectronic devices. (C) 2001 Elsevier Science B.V. All rights reserved.
Original languageEnglish
Pages (from-to)277-280
JournalThin Solid Films
Volume383
Issue number1-2
DOIs
Publication statusPublished - 1 Jan 2001

Keywords

  • Zinc oxide
  • Spray pyrolysis
  • Annealing treatment
  • Thin films

Fingerprint

Dive into the research topics of 'Influence of the post-treatment on the properties of ZnO thin films'. Together they form a unique fingerprint.

Cite this