Influence of the oxygen/argon ratio on the properties of sputtered hafnium oxide

Research output: Contribution to journalArticlepeer-review

59 Citations (Scopus)
Original languageEnglish
Pages (from-to)210-213
Number of pages4
JournalMaterials Science And Engineering B-Advanced Functional Solid-State Materials
Volume118
Issue number1-3
DOIs
Publication statusPublished - 25 Apr 2005

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