Influence of the oxygen/argon ratio on the properties of sputtered hafnium oxide

Luis Miguel Nunes Pereira; Pedro Miguel Cândido Barquinha; Elvira Maria Correia Fortunato; Rodrigo Ferrão de Paiva Martins

doi:10.1016/j.mseb.2004.12.030

Influence of the oxygen/argon ratio on the properties of sputtered hafnium oxide

Luis Miguel Nunes Pereira, Pedro Miguel Cândido Barquinha, Elvira Maria Correia Fortunato, Rodrigo Ferrão de Paiva Martins

DCM - Departamento de Ciência dos Materiais

Research output: Contribution to journal › Article › peer-review

63 Citations (Scopus)

Original language	English
Pages (from-to)	210-213
Number of pages	4
Journal	Materials Science And Engineering B-Advanced Functional Solid-State Materials
Volume	118
Issue number	1-3
DOIs	https://doi.org/10.1016/j.mseb.2004.12.030
Publication status	Published - 25 Apr 2005

Access to Document

10.1016/j.mseb.2004.12.030

Cite this

@article{85b2e2a5258f4e6d8a434707b6910244,

title = "Influence of the oxygen/argon ratio on the properties of sputtered hafnium oxide",

author = "Pereira, {Luis Miguel Nunes} and Barquinha, {Pedro Miguel C{\^a}ndido} and Fortunato, {Elvira Maria Correia} and Martins, {Rodrigo Ferr{\~a}o de Paiva}",

year = "2005",

month = apr,

day = "25",

doi = "10.1016/j.mseb.2004.12.030",

language = "English",

volume = "118",

pages = "210--213",

journal = "Materials Science And Engineering B-Advanced Functional Solid-State Materials",

issn = "0921-5107",

publisher = "Elsevier Science B.V., Amsterdam.",

number = "1-3",

}

Influence of the oxygen/argon ratio on the properties of sputtered hafnium oxide. / Pereira, Luis Miguel Nunes ; Barquinha, Pedro Miguel Cândido ; Fortunato, Elvira Maria Correia et al.
In: Materials Science And Engineering B-Advanced Functional Solid-State Materials, Vol. 118, No. 1-3, 25.04.2005, p. 210-213.

Research output: Contribution to journal › Article › peer-review

TY - JOUR

T1 - Influence of the oxygen/argon ratio on the properties of sputtered hafnium oxide

AU - Pereira, Luis Miguel Nunes

AU - Barquinha, Pedro Miguel Cândido

AU - Fortunato, Elvira Maria Correia

AU - Martins, Rodrigo Ferrão de Paiva

PY - 2005/4/25

Y1 - 2005/4/25

U2 - 10.1016/j.mseb.2004.12.030

DO - 10.1016/j.mseb.2004.12.030

M3 - Article

SN - 0921-5107

VL - 118

SP - 210

EP - 213

JO - Materials Science And Engineering B-Advanced Functional Solid-State Materials

JF - Materials Science And Engineering B-Advanced Functional Solid-State Materials

IS - 1-3

ER -