Original language | English |
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Pages (from-to) | 243-247 |
Number of pages | 5 |
Journal | Materials Science in Semiconductor Processing |
Volume | 7 |
Issue number | 4-6 |
DOIs | |
Publication status | Published - 1 Jan 2004 |
Influence of the deposition conditions on the properties of titanium oxide produced by r.f. magnetron sputtering
Pedro Miguel Cândido Barquinha, Luis Miguel Nunes Pereira, Hugo Manuel Brito Águas, Elvira Maria Correia Fortunato, Rodrigo Ferrão de Paiva Martins
Research output: Contribution to journal › Article › peer-review
14
Citations
(Scopus)