Influence of oxygen/argon pressure ratio on the morphology, optical and electrical properties of ITO thin films deposited at room temperature

Hai-Ning Cui; Vasco Manuel Pinto Teixeira; Li Jian Meng; Rodrigo Ferrão de Paiva Martins; Elvira Maria Correia Fortunato

doi:10.1016/j.vacuum.2008.03.061

Influence of oxygen/argon pressure ratio on the morphology, optical and electrical properties of ITO thin films deposited at room temperature

Hai-Ning Cui, Vasco Manuel Pinto Teixeira, Li Jian Meng, Rodrigo Ferrão de Paiva Martins, Elvira Maria Correia Fortunato

Research output: Contribution to journal › Article › peer-review

58 Citations (Scopus)

Original language	English
Pages (from-to)	1507-1511
Number of pages	5
Journal	Vacuum
Volume	82
Issue number	12
DOIs	https://doi.org/10.1016/j.vacuum.2008.03.061
Publication status	Published - 8 Aug 2008

Access to Document

10.1016/j.vacuum.2008.03.061

Cite this

@article{73de81b75b0f47e78913af69ef7935bc,

title = "Influence of oxygen/argon pressure ratio on the morphology, optical and electrical properties of ITO thin films deposited at room temperature",

author = "Hai-Ning Cui and Teixeira, {Vasco Manuel Pinto} and Meng, {Li Jian} and Martins, {Rodrigo Ferr{\~a}o de Paiva} and Fortunato, {Elvira Maria Correia}",

year = "2008",

month = aug,

day = "8",

doi = "10.1016/j.vacuum.2008.03.061",

language = "English",

volume = "82",

pages = "1507--1511",

journal = "Vacuum",

issn = "0042-207X",

publisher = "Elsevier",

number = "12",

}

TY - JOUR

T1 - Influence of oxygen/argon pressure ratio on the morphology, optical and electrical properties of ITO thin films deposited at room temperature

AU - Cui, Hai-Ning

AU - Teixeira, Vasco Manuel Pinto

AU - Meng, Li Jian

AU - Martins, Rodrigo Ferrão de Paiva

AU - Fortunato, Elvira Maria Correia

PY - 2008/8/8

Y1 - 2008/8/8

U2 - 10.1016/j.vacuum.2008.03.061

DO - 10.1016/j.vacuum.2008.03.061

M3 - Article

SN - 0042-207X

VL - 82

SP - 1507

EP - 1511

JO - Vacuum

JF - Vacuum

IS - 12

ER -