Influence of magnetron sputtering conditions on the chemical bonding, structural, morphological and optical behavior of Ta1 − xOx coatings

C. F. Almeida Alves, C. Mansilla, L. Pereira, F. Paumier, T. Girardeau, S. Carvalho

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

In this work Ta1 − xOx coatings were deposited by DC magnetron sputtering in an Ar + O2 atmosphere. The influence of the oxygen partial pressure on the morphology (SEM), structure (XRD), chemical bonding (XPS), thermal oxidation and optical response (FTIR and spectroscopic ellipsometry) of Ta-based films was study. Cross-section morphology revealed that the increase of oxygen content in the coatings change the columnar morphology to featureless. Likewise, structural results showed that the small increase of oxygen amount leads to a change from Ta stable phase (α-Ta: bcc) to a mixture of phases achieving oxide phases with large amounts of oxygen. Whereas at room temperature the oxide coatings mainly revealed an amorphous character, at 700 °C the coating reached the crystallization Ta2O5 orthorhombic phase, which is promoted by the temperature. Further, although not observed in XRD, for the coatings deposited close to the reactive mode threshold IR showed absorption bands corresponding to amorphous phase containing some crystals embedded on it, while for the coatings deposited in the poisoned regime the IR suggests a marked amorphous nature. Refractive index varied between 2.09 and 2.27 at 0.65 μm, within the range reported for Ta2O5 thin films. The changes in refractive index are correlated with the different crystallinity of the coatings, which is corroborated with the IR results.

Original languageEnglish
Pages (from-to)105-115
Number of pages11
JournalSurface and Coatings Technology
Volume334
DOIs
Publication statusPublished - 25 Jan 2018

Fingerprint

Magnetron sputtering
magnetron sputtering
coatings
Coatings
Oxygen
oxygen
Oxides
Refractive index
refractivity
oxides
Spectroscopic ellipsometry
Crystallization
Partial pressure
ellipsometry
partial pressure
Absorption spectra
crystallinity
X ray photoelectron spectroscopy
direct current
crystallization

Keywords

  • Coatings
  • Spectroscopic ellipsometry
  • Tantalum oxide
  • Thermal oxidation

Cite this

@article{f8a926cc02cd408f85747d26a10417fd,
title = "Influence of magnetron sputtering conditions on the chemical bonding, structural, morphological and optical behavior of Ta1 − xOx coatings",
abstract = "In this work Ta1 − xOx coatings were deposited by DC magnetron sputtering in an Ar + O2 atmosphere. The influence of the oxygen partial pressure on the morphology (SEM), structure (XRD), chemical bonding (XPS), thermal oxidation and optical response (FTIR and spectroscopic ellipsometry) of Ta-based films was study. Cross-section morphology revealed that the increase of oxygen content in the coatings change the columnar morphology to featureless. Likewise, structural results showed that the small increase of oxygen amount leads to a change from Ta stable phase (α-Ta: bcc) to a mixture of phases achieving oxide phases with large amounts of oxygen. Whereas at room temperature the oxide coatings mainly revealed an amorphous character, at 700 °C the coating reached the crystallization Ta2O5 orthorhombic phase, which is promoted by the temperature. Further, although not observed in XRD, for the coatings deposited close to the reactive mode threshold IR showed absorption bands corresponding to amorphous phase containing some crystals embedded on it, while for the coatings deposited in the poisoned regime the IR suggests a marked amorphous nature. Refractive index varied between 2.09 and 2.27 at 0.65 μm, within the range reported for Ta2O5 thin films. The changes in refractive index are correlated with the different crystallinity of the coatings, which is corroborated with the IR results.",
keywords = "Coatings, Spectroscopic ellipsometry, Tantalum oxide, Thermal oxidation",
author = "{Almeida Alves}, {C. F.} and C. Mansilla and L. Pereira and F. Paumier and T. Girardeau and S. Carvalho",
note = "This research is sponsored by the Portuguese Foundation for Science and Technology (FCT) in the framework of the Strategic Funding UID/FIS/04650/2013 and with a PhD fellowship SFRH/BD/98199/2013. The authors also thank the financial support by IAPMEI funds through QREN - Implantes dentarios inteligentes - SMARTDENT, Projeto Vale Inovacao no 2012/24005, the project {"}Efeito sobre a saude humana do tratamento de couros para a industria do calcado com nanomateriais de Ag-TiO<INF>2</INF> - ERA-SIINN/0004/2013{"} financed by OE of FCT, the PAULIF program {"}Programa Acoes Universitarias Integradas Luso-Francesas - PAUILF - 2014{"} with the project {"}Development of bioactive surfaces for bone ingrowth on dental implant{"}, action integrated number TC 08/14 and MCTES - SPRH/BSAB/128423/2017 project.",
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Influence of magnetron sputtering conditions on the chemical bonding, structural, morphological and optical behavior of Ta1 − xOx coatings. / Almeida Alves, C. F.; Mansilla, C.; Pereira, L.; Paumier, F.; Girardeau, T.; Carvalho, S.

In: Surface and Coatings Technology, Vol. 334, 25.01.2018, p. 105-115.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Influence of magnetron sputtering conditions on the chemical bonding, structural, morphological and optical behavior of Ta1 − xOx coatings

AU - Almeida Alves, C. F.

AU - Mansilla, C.

AU - Pereira, L.

AU - Paumier, F.

AU - Girardeau, T.

AU - Carvalho, S.

N1 - This research is sponsored by the Portuguese Foundation for Science and Technology (FCT) in the framework of the Strategic Funding UID/FIS/04650/2013 and with a PhD fellowship SFRH/BD/98199/2013. The authors also thank the financial support by IAPMEI funds through QREN - Implantes dentarios inteligentes - SMARTDENT, Projeto Vale Inovacao no 2012/24005, the project "Efeito sobre a saude humana do tratamento de couros para a industria do calcado com nanomateriais de Ag-TiO<INF>2</INF> - ERA-SIINN/0004/2013" financed by OE of FCT, the PAULIF program "Programa Acoes Universitarias Integradas Luso-Francesas - PAUILF - 2014" with the project "Development of bioactive surfaces for bone ingrowth on dental implant", action integrated number TC 08/14 and MCTES - SPRH/BSAB/128423/2017 project.

PY - 2018/1/25

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N2 - In this work Ta1 − xOx coatings were deposited by DC magnetron sputtering in an Ar + O2 atmosphere. The influence of the oxygen partial pressure on the morphology (SEM), structure (XRD), chemical bonding (XPS), thermal oxidation and optical response (FTIR and spectroscopic ellipsometry) of Ta-based films was study. Cross-section morphology revealed that the increase of oxygen content in the coatings change the columnar morphology to featureless. Likewise, structural results showed that the small increase of oxygen amount leads to a change from Ta stable phase (α-Ta: bcc) to a mixture of phases achieving oxide phases with large amounts of oxygen. Whereas at room temperature the oxide coatings mainly revealed an amorphous character, at 700 °C the coating reached the crystallization Ta2O5 orthorhombic phase, which is promoted by the temperature. Further, although not observed in XRD, for the coatings deposited close to the reactive mode threshold IR showed absorption bands corresponding to amorphous phase containing some crystals embedded on it, while for the coatings deposited in the poisoned regime the IR suggests a marked amorphous nature. Refractive index varied between 2.09 and 2.27 at 0.65 μm, within the range reported for Ta2O5 thin films. The changes in refractive index are correlated with the different crystallinity of the coatings, which is corroborated with the IR results.

AB - In this work Ta1 − xOx coatings were deposited by DC magnetron sputtering in an Ar + O2 atmosphere. The influence of the oxygen partial pressure on the morphology (SEM), structure (XRD), chemical bonding (XPS), thermal oxidation and optical response (FTIR and spectroscopic ellipsometry) of Ta-based films was study. Cross-section morphology revealed that the increase of oxygen content in the coatings change the columnar morphology to featureless. Likewise, structural results showed that the small increase of oxygen amount leads to a change from Ta stable phase (α-Ta: bcc) to a mixture of phases achieving oxide phases with large amounts of oxygen. Whereas at room temperature the oxide coatings mainly revealed an amorphous character, at 700 °C the coating reached the crystallization Ta2O5 orthorhombic phase, which is promoted by the temperature. Further, although not observed in XRD, for the coatings deposited close to the reactive mode threshold IR showed absorption bands corresponding to amorphous phase containing some crystals embedded on it, while for the coatings deposited in the poisoned regime the IR suggests a marked amorphous nature. Refractive index varied between 2.09 and 2.27 at 0.65 μm, within the range reported for Ta2O5 thin films. The changes in refractive index are correlated with the different crystallinity of the coatings, which is corroborated with the IR results.

KW - Coatings

KW - Spectroscopic ellipsometry

KW - Tantalum oxide

KW - Thermal oxidation

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DO - 10.1016/j.surfcoat.2017.11.001

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JF - Surface & Coatings Technology

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