TY - JOUR
T1 - Influence of ion induced secondary electron emission on the stability of ionisation vacuum gauges
AU - Figueiredo, I.
AU - Bundaleski, Nenad
AU - Teodoro, Orlando M. N. D.
AU - Jousten, K.
AU - Illgen, C.
N1 - Funding Information:
This work has received funding from the EMPIR programme (project 16NRM05 ‘Ion gauge’) co-financed by the Participating States and from the European Union's Horizon 2020 research and innovation programme, and the Portuguese National Funding Agency for Science, Research and Technology in the framework of the project UID/FIS/00068/2019 . The authors also thank Mihail Granovskij and other colleagues from VACOM, for providing the yttria coated iridium filament used in our experiments.
PY - 2021/2
Y1 - 2021/2
N2 - Surface modification of different materials exposed to an environment typical for hot cathode ionisation vacuum gauges was investigated. Such environment has been generated in a specially designed setup which simulates conditions in a Bayard-Alpert ionisation vacuum gauge. Characterisations by means of X-ray photoelectron spectroscopy and work function study have been performed before and after the sample exposure to Ar and H2 gas discharges. The majority of studied materials, such as molybdenum, gold or stainless steel, are considered to be of interest as ion collectors. In addition, experiments with copper and graphite revealed the major processes that are taking place during the exposure to an ionisation vacuum gauge environment. Since the stability of ionisation vacuum gauges can be affected by the change of secondary electron emission properties of ion collectors during the operation, the corresponding electron yield induced by bombardment of low energy Ar+ ions was measured. Results show that exposure to ionisation vacuum gauge environment contributes to development of hydrocarbon layers, independently from the collector material or the dominant species in the gas discharge. Therefore, ion induced secondary electron yield of clean materials will be changing during the gauge operation and eventually reach saturation regardless of the collector material. The results also show that the hydrocarbon layer cannot be desorbed by standard vacuum baking procedures, whilst ion bombardment will even increase the rate of the hydrocarbon layer formation.
AB - Surface modification of different materials exposed to an environment typical for hot cathode ionisation vacuum gauges was investigated. Such environment has been generated in a specially designed setup which simulates conditions in a Bayard-Alpert ionisation vacuum gauge. Characterisations by means of X-ray photoelectron spectroscopy and work function study have been performed before and after the sample exposure to Ar and H2 gas discharges. The majority of studied materials, such as molybdenum, gold or stainless steel, are considered to be of interest as ion collectors. In addition, experiments with copper and graphite revealed the major processes that are taking place during the exposure to an ionisation vacuum gauge environment. Since the stability of ionisation vacuum gauges can be affected by the change of secondary electron emission properties of ion collectors during the operation, the corresponding electron yield induced by bombardment of low energy Ar+ ions was measured. Results show that exposure to ionisation vacuum gauge environment contributes to development of hydrocarbon layers, independently from the collector material or the dominant species in the gas discharge. Therefore, ion induced secondary electron yield of clean materials will be changing during the gauge operation and eventually reach saturation regardless of the collector material. The results also show that the hydrocarbon layer cannot be desorbed by standard vacuum baking procedures, whilst ion bombardment will even increase the rate of the hydrocarbon layer formation.
KW - Ion induced secondary electron emission
KW - Ionisation vacuum gauges
KW - XPS
UR - https://www.scopus.com/pages/publications/85096184820
U2 - 10.1016/j.vacuum.2020.109907
DO - 10.1016/j.vacuum.2020.109907
M3 - Article
AN - SCOPUS:85096184820
SN - 0042-207X
VL - 184
JO - Vacuum
JF - Vacuum
M1 - 109907
ER -