Incorporation of N in TiO2 films grown by DC-reactive magnetron sputtering

Research output: Contribution to journal › Article › peer-review

Original language	Unknown
Pages (from-to)	109-112
Journal	Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Volume	273
Issue number	NA
DOIs	https://doi.org/10.1016/j.nimb.2011.07.052
Publication status	Published - 1 Jan 2012

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@article{22ae318e1f194b8eb107ec495de8db13,

title = "Incorporation of N in TiO2 films grown by DC-reactive magnetron sputtering",

keywords = "Band gap tuning, Ion beam analysis, Sputtering, N-doping TiO2",

author = "Venceslau, {Susana Isabel dos Santos Silva S{\'e}rio} and Nunes, {Yuri Fonseca da Silva}",

note = "Sem PDF",

year = "2012",

month = jan,

day = "1",

doi = "10.1016/j.nimb.2011.07.052",

language = "Unknown",

volume = "273",

pages = "109--112",

journal = "Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms",

publisher = "Elsevier",

number = "NA",

}

Research output: Contribution to journal › Article › peer-review

TY - JOUR

T1 - Incorporation of N in TiO2 films grown by DC-reactive magnetron sputtering

AU - Venceslau, Susana Isabel dos Santos Silva Sério

AU - Nunes, Yuri Fonseca da Silva

N1 - Sem PDF

PY - 2012/1/1

Y1 - 2012/1/1

KW - Band gap tuning

KW - Ion beam analysis

KW - Sputtering

KW - N-doping TiO2

U2 - 10.1016/j.nimb.2011.07.052

DO - 10.1016/j.nimb.2011.07.052

M3 - Article

VL - 273

SP - 109

EP - 112

JO - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

IS - NA

ER -