In-situ study of the preferential orientation of magnetron sputtered ni-ti thin films as a function of bias and substrate type

Rui M. S. Martins, Norbert Schell, Manfred Beckers, Arndt Mücklich, Helfried Reuther, Rui J.C. Silva, Karimbi K. Mahesh, F. M.Braz Fernandes

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

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Engineering & Materials Science

Chemistry