In Situ Characterization and Modification of β-Ga 2 O 3 Flakes Using an Ion Micro-Probe

Marco Peres, Luis C. Alves, Flávia Rocha, Norberto Catarino, Carlos H. Brito Cruz, Eduardo Alves, Ana G. Silva, Encarna G. Víllora, Kiyoshi Shimamura, Katharina Lorenz

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5 Citations (Scopus)


In situ characterization of β-Ga 2 O 3 flakes during proton irradiation is performed using ionoluminescence and electrical measurements. The quenching of the native blue-UV emission bands due to irradiation-induced defects in real time is monitored by ionoluminescence. Measurements of the I–V characteristics during irradiation present a good response of Ga 2 O 3 for particle detection and a good radiation resistance.

Original languageEnglish
Article number1800190
JournalPhysica Status Solidi (A) Applications and Materials Science
Issue number19
Publication statusPublished - 10 Oct 2018


  • ionoluminescence
  • irradiation
  • micro-probe
  • β-Ga O


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