Improving the Lubrication of Silicon Surfaces Using Ionic Liquids as Oil Additives: The Effect of Sulfur-Based Functional Groups

Mónica Antunes, Mariana T. Donato, Victória Paz, Fernando Caetano, Luís F. Santos, Rogério Colaço, Luís C. Branco, Benilde Saramago

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

The performance of micro/nanoelectromechanical systems (MEMS/NEMS) relies on efficient lubrication. In the present work, new sulfur-based organic salts were tested as additives in a polyethylene glycol to lubricate silicon surfaces used in the manufacture of MEMS/NEMS. Seven salts were tested: 1-butylsulfonic-3-methylimidazolium triflate [(C4SO3H)MIM][TfO], thiamine triflate [Thiamine][TfO]2, 1-ethyl-3-methylimidazolium camphorsulfonate [C2MIM][CSA] [isomers (R) and (S)], 1,3-dimethylpiridinium methylsulfate [C1-3pic][MeSO4], methylimidazolium methanesulfonate [HMIM][MeSO3], and tetramethylguanidine methanesulfonate [TMG][MeSO3]. A nanotribometer was used to determine the friction coefficients using steel spheres as counter bodies. Excellent tribological properties were achieved with the additives containing the anions [MeSO4] and [MeSO3]. The films formed on the Si substrates were studied by FTIR, ellipsometry and AFM. A mixed lubrication mechanism was proposed where additive adsorption avoids contact between sliding surfaces. Graphical Abstract: [Figure not available: see fulltext.].

Original languageEnglish
Article number70
JournalTribology Letters
Volume68
Issue number2
DOIs
Publication statusPublished - 1 Jun 2020

Keywords

  • Additives
  • Friction coefficient
  • Ionic liquids
  • Silicon

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