Abstract
The use of ITO thin films on glass/ITO/p-i-n/metal amorphous silicon solar cells is reviewed. It is suggested a new application for silicon monoxide thin films on the ITO-p interface, as an intermediate layer, to minimize the ITO thin film deterioration process, during the early stage of exposure to a silane plasma rich in hydrogen. The thickness of the silicon monoxide thin films is chosen not to worsen the optical and electrical properties of the ITO thin films. The ITO-p interface is optimized (due to impurities diffusion decrease), leading to an overall improvement of the device performance.
Original language | English |
---|---|
Pages (from-to) | 861-865 |
Number of pages | 5 |
Journal | Materials Research Society Symposium Proceedings |
Volume | 420 |
Publication status | Published - 1996 |
Event | 14th Symposium on Amorphous Silicon Technology, at the 1996 MRS Spring Meeting - San Francisco, United States Duration: 8 Apr 1996 → 12 Apr 1996 |