Improved thermoelectric properties of nanocrystalline hydrogenated silicon thin films by post-deposition thermal annealing

Engineering & Materials Science

• Annealing 89%
• Thin films 85%
• Silicon 70%
• Seebeck coefficient 47%
• Hot Temperature 43%
• Plasma enhanced chemical vapor deposition 42%
• Crystalline materials 31%
• Thermal conductivity 27%
• Vacuum 26%
• Temperature 24%

Chemistry

• Thermoelectricity 100%
• Annealing 70%
• Liquid Film 43%
• Seebeck Coefficient 38%
• Plasma Enhanced Chemical Vapour Deposition 36%
• Thermal Conductivity 28%
• Vacuum 23%
• Ambient Reaction Temperature 16%

Physics & Astronomy

• annealing 54%
• silicon 48%
• thin films 46%
• Seebeck effect 31%
• thermal conductivity 23%
• vapor deposition 23%
• vacuum 18%
• room temperature 16%
• temperature 8%