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Hydrogenated silicon carbon nitride films obtained by HWCVD, PA-HWCVD and PECVD techniques
Isabel Ferreira, Elvira Maria Correia Fortunato, P. M. Vilarinho, Ana S. Viana, Eduardo Alves, Rodrigo Ferrão de Paiva Martins
Research output: Contribution to journal › Article › peer-review
42
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(Scopus)