Highly sensitive ZnO ozone detectors at room temperature

Marcus Bender; Elvira Fortunato; Patrícia Nunes; Isabel Ferreira; António Marques; Rodrigo Martins; Nikos Katsarakis; Volker Cimalla; George Kiriakidis

Highly sensitive ZnO ozone detectors at room temperature

Marcus Bender, Elvira Fortunato, Patrícia Nunes, Isabel Ferreira, António Marques, Rodrigo Martins, Nikos Katsarakis, Volker Cimalla, George Kiriakidis

Research output: Contribution to journal › Letter › peer-review

63 Citations (Scopus)

Abstract

In this letter we compare the room temperature ozone sensing properties of intrinsic zinc oxide (ZnO) thin films deposited by spray pyrolysis, dc and r.f. magnetron sputtering. Their sensor response exceeds 8 orders of magnitude when the film structure is constituted by nanocrystallites. These preliminary results clearly demonstrate that the films could be potentially used for ozone detection at room temperature.

Original language	English
Pages (from-to)	L435-L437
Number of pages	3
Journal	Japanese Journal Of Applied Physics
Volume	42
Issue number	4 B
Publication status	Published - 15 Apr 2003

Keywords

Nanostructured oxides
Oxide semiconductors
Ozone sensors
ZnO thin films

Cite this

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title = "Highly sensitive ZnO ozone detectors at room temperature",

abstract = "In this letter we compare the room temperature ozone sensing properties of intrinsic zinc oxide (ZnO) thin films deposited by spray pyrolysis, dc and r.f. magnetron sputtering. Their sensor response exceeds 8 orders of magnitude when the film structure is constituted by nanocrystallites. These preliminary results clearly demonstrate that the films could be potentially used for ozone detection at room temperature.",

keywords = "Nanostructured oxides, Oxide semiconductors, Ozone sensors, ZnO thin films",

author = "Marcus Bender and Elvira Fortunato and Patr{\'i}cia Nunes and Isabel Ferreira and Ant{\'o}nio Marques and Rodrigo Martins and Nikos Katsarakis and Volker Cimalla and George Kiriakidis",

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pages = "L435--L437",

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T1 - Highly sensitive ZnO ozone detectors at room temperature

AU - Bender, Marcus

AU - Fortunato, Elvira

AU - Nunes, Patrícia

AU - Ferreira, Isabel

AU - Marques, António

AU - Martins, Rodrigo

AU - Katsarakis, Nikos

AU - Cimalla, Volker

AU - Kiriakidis, George

PY - 2003/4/15

Y1 - 2003/4/15

N2 - In this letter we compare the room temperature ozone sensing properties of intrinsic zinc oxide (ZnO) thin films deposited by spray pyrolysis, dc and r.f. magnetron sputtering. Their sensor response exceeds 8 orders of magnitude when the film structure is constituted by nanocrystallites. These preliminary results clearly demonstrate that the films could be potentially used for ozone detection at room temperature.

AB - In this letter we compare the room temperature ozone sensing properties of intrinsic zinc oxide (ZnO) thin films deposited by spray pyrolysis, dc and r.f. magnetron sputtering. Their sensor response exceeds 8 orders of magnitude when the film structure is constituted by nanocrystallites. These preliminary results clearly demonstrate that the films could be potentially used for ozone detection at room temperature.

KW - Nanostructured oxides

KW - Oxide semiconductors

KW - Ozone sensors

KW - ZnO thin films

UR - http://www.scopus.com/inward/record.url?scp=0038207841&partnerID=8YFLogxK

M3 - Letter

AN - SCOPUS:0038207841

SN - 0021-4922

VL - 42

SP - L435-L437

JO - Japanese Journal Of Applied Physics

JF - Japanese Journal Of Applied Physics

IS - 4 B

ER -

Highly sensitive ZnO ozone detectors at room temperature

Abstract

Keywords

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