Highly sensitive ZnO ozone detectors at room temperature

Marcus Bender, Elvira Fortunato, Patrícia Nunes, Isabel Ferreira, António Marques, Rodrigo Martins, Nikos Katsarakis, Volker Cimalla, George Kiriakidis

Research output: Contribution to journalLetterpeer-review

62 Citations (Scopus)


In this letter we compare the room temperature ozone sensing properties of intrinsic zinc oxide (ZnO) thin films deposited by spray pyrolysis, dc and r.f. magnetron sputtering. Their sensor response exceeds 8 orders of magnitude when the film structure is constituted by nanocrystallites. These preliminary results clearly demonstrate that the films could be potentially used for ozone detection at room temperature.

Original languageEnglish
Pages (from-to)L435-L437
Number of pages3
JournalJapanese Journal Of Applied Physics
Issue number4 B
Publication statusPublished - 15 Apr 2003


  • Nanostructured oxides
  • Oxide semiconductors
  • Ozone sensors
  • ZnO thin films


Dive into the research topics of 'Highly sensitive ZnO ozone detectors at room temperature'. Together they form a unique fingerprint.

Cite this