Growth of polymorphous/nanocrystalline silicon films deposited by PECVD at 13.56 MHz

Leandro Raniero; Rodrigo Ferrão de Paiva Martins; Hugo Manuel Brito Águas; Isabel Maria Mercês Ferreira; Luis Miguel Nunes Pereira; Elvira Maria Correia Fortunato

doi:10.4028/www.scientific.net/MSF.455-456.532

Growth of polymorphous/nanocrystalline silicon films deposited by PECVD at 13.56 MHz

Leandro Raniero, Rodrigo Ferrão de Paiva Martins, Hugo Manuel Brito Águas, Isabel Maria Mercês Ferreira, Luis Miguel Nunes Pereira, Elvira Maria Correia Fortunato

DCM - Departamento de Ciência dos Materiais

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Original language	English
Pages (from-to)	532-535
Number of pages	4
Journal	Advanced Materials Forum Iii, Pts 1 And 2
Volume	455-456
Issue number	NA
DOIs	https://doi.org/10.4028/www.scientific.net/MSF.455-456.532
Publication status	Published - 1 Jan 2004

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10.4028/www.scientific.net/MSF.455-456.532

Cite this

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title = "Growth of polymorphous/nanocrystalline silicon films deposited by PECVD at 13.56 MHz",

author = "Leandro Raniero and Martins, \{Rodrigo Ferr{\~a}o de Paiva\} and {\'A}guas, \{Hugo Manuel Brito\} and Ferreira, \{Isabel Maria Merc{\^e}s\} and Pereira, \{Luis Miguel Nunes\} and Fortunato, \{Elvira Maria Correia\}",

year = "2004",

month = jan,

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doi = "10.4028/www.scientific.net/MSF.455-456.532",

language = "English",

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T1 - Growth of polymorphous/nanocrystalline silicon films deposited by PECVD at 13.56 MHz

AU - Raniero, Leandro

AU - Martins, Rodrigo Ferrão de Paiva

AU - Águas, Hugo Manuel Brito

AU - Ferreira, Isabel Maria Mercês

AU - Pereira, Luis Miguel Nunes

AU - Fortunato, Elvira Maria Correia

PY - 2004/1/1

Y1 - 2004/1/1

U2 - 10.4028/www.scientific.net/MSF.455-456.532

DO - 10.4028/www.scientific.net/MSF.455-456.532

M3 - Article

SN - 0255-5476

VL - 455-456

SP - 532

EP - 535

JO - Advanced Materials Forum Iii, Pts 1 And 2

JF - Advanced Materials Forum Iii, Pts 1 And 2

IS - NA

ER -