Original language | English |
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Pages (from-to) | 532-535 |
Number of pages | 4 |
Journal | Advanced Materials Forum Iii, Pts 1 And 2 |
Volume | 455-456 |
Issue number | NA |
DOIs | |
Publication status | Published - 1 Jan 2004 |
Growth of polymorphous/nanocrystalline silicon films deposited by PECVD at 13.56 MHz
Leandro Raniero, Rodrigo Ferrão de Paiva Martins, Hugo Manuel Brito Águas, Isabel Maria Mercês Ferreira, Luis Miguel Nunes Pereira, Elvira Maria Correia Fortunato
Research output: Contribution to journal › Article › peer-review
1
Citation
(Scopus)