Abstract

A quantitative study of the dynamics of threshold-voltage shifts with time in gallium-indium zinc oxide amorphous thin-film transistors is presented using standard analysis based on the stretched exponential relaxation. For devices using thermal silicon oxide as gate dielectric, the relaxation time is 3x10(5) s at room temperature with activation energy of 0.68 eV. These transistors approach the stability of the amorphous silicon transistors. The threshold voltage shift is faster after water vapor exposure suggesting that the origin of this instability is charge trapping at residual-water-related trap sites.
Original languageUnknown
Pages (from-to)nr. 063502
JournalApplied Physics Letters
Volume95
Issue number6
DOIs
Publication statusPublished - 1 Jan 2009

Cite this