Gallium zinc oxide coated polymeric substrates for optoelectronic applications

E. Fortunato; A. Gonçalves; A. Marques; V. Assunção; I. Ferreira; H. Águas; L. Pereira; R. Martins

Gallium zinc oxide coated polymeric substrates for optoelectronic applications

E. Fortunato, A. Gonçalves, A. Marques, V. Assunção, I. Ferreira, H. Águas, L. Pereira, R. Martins

DCM - Departamento de Ciência dos Materiais

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

Highly transparent and conductive ZnO:Ga thin films were produced by rf magnetron sputtering at room temperature on polyethylene naphthalate substrates. The films present a good electrical and optical stability, surface uniformity and a very good adhesion to the polymeric substrates. The lowest resistivity obtained was 5×10^-4 Ωcm with a sheet resistance of 15 Ω/sqr and an average optical transmittance in the visible part of the spectra of 80%. It was also shown that by passivating the polymeric surface with a thin SiO₂ layer, the electrical and structural properties of the films are improved nearly by a factor of 2.

Original language	English
Pages (from-to)	291-296
Number of pages	6
Journal	MRS Proceedings
Volume	769
Publication status	Published - 2003

Cite this

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title = "Gallium zinc oxide coated polymeric substrates for optoelectronic applications",

abstract = "Highly transparent and conductive ZnO:Ga thin films were produced by rf magnetron sputtering at room temperature on polyethylene naphthalate substrates. The films present a good electrical and optical stability, surface uniformity and a very good adhesion to the polymeric substrates. The lowest resistivity obtained was 5×10-4 Ωcm with a sheet resistance of 15 Ω/sqr and an average optical transmittance in the visible part of the spectra of 80%. It was also shown that by passivating the polymeric surface with a thin SiO2 layer, the electrical and structural properties of the films are improved nearly by a factor of 2.",

author = "E. Fortunato and A. Gon{\c c}alves and A. Marques and V. Assun{\c c}{\~a}o and I. Ferreira and H. {\'A}guas and L. Pereira and R. Martins",

year = "2003",

language = "English",

volume = "769",

pages = "291--296",

journal = "MRS Proceedings",

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TY - JOUR

T1 - Gallium zinc oxide coated polymeric substrates for optoelectronic applications

AU - Fortunato, E.

AU - Gonçalves, A.

AU - Marques, A.

AU - Assunção, V.

AU - Ferreira, I.

AU - Águas, H.

AU - Pereira, L.

AU - Martins, R.

PY - 2003

Y1 - 2003

N2 - Highly transparent and conductive ZnO:Ga thin films were produced by rf magnetron sputtering at room temperature on polyethylene naphthalate substrates. The films present a good electrical and optical stability, surface uniformity and a very good adhesion to the polymeric substrates. The lowest resistivity obtained was 5×10-4 Ωcm with a sheet resistance of 15 Ω/sqr and an average optical transmittance in the visible part of the spectra of 80%. It was also shown that by passivating the polymeric surface with a thin SiO2 layer, the electrical and structural properties of the films are improved nearly by a factor of 2.

AB - Highly transparent and conductive ZnO:Ga thin films were produced by rf magnetron sputtering at room temperature on polyethylene naphthalate substrates. The films present a good electrical and optical stability, surface uniformity and a very good adhesion to the polymeric substrates. The lowest resistivity obtained was 5×10-4 Ωcm with a sheet resistance of 15 Ω/sqr and an average optical transmittance in the visible part of the spectra of 80%. It was also shown that by passivating the polymeric surface with a thin SiO2 layer, the electrical and structural properties of the films are improved nearly by a factor of 2.

UR - http://www.scopus.com/inward/record.url?scp=1542364393&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:1542364393

VL - 769

SP - 291

EP - 296

JO - MRS Proceedings

JF - MRS Proceedings

ER -

Gallium zinc oxide coated polymeric substrates for optoelectronic applications

Abstract

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