Gallium zinc oxide coated polymeric substrates for optoelectronic applications

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Abstract

Highly transparent and conductive ZnO:Ga thin films were produced by rf magnetron sputtering at room temperature on polyethylene naphthalate substrates. The films present a good electrical and optical stability, surface uniformity and a very good adhesion to the polymeric substrates. The lowest resistivity obtained was 5×10-4 Ωcm with a sheet resistance of 15 Ω/sqr and an average optical transmittance in the visible part of the spectra of 80%. It was also shown that by passivating the polymeric surface with a thin SiO2 layer, the electrical and structural properties of the films are improved nearly by a factor of 2.

Original languageEnglish
Pages (from-to)291-296
Number of pages6
JournalMRS Proceedings
Volume769
Publication statusPublished - 2003

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