TY - GEN
T1 - From intelligent materials to smart sensors
T2 - MRS Spring Symposium
AU - Fortunato, E.
AU - Fernandes, M.
AU - Soares, F.
AU - Lavareda, G.
AU - Martins, R.
PY - 1996
Y1 - 1996
N2 - This work presents the main static and dynamic performances showed by one dimensional thin film position sensitive detectors (1D TFPSD), based on a-Si:H technology, with a size of 80 mm × 5 mm. The results obtained show that the TFPSD is able to respond to light powers as low as 2μ W/cm2, presenting a detection accuracy, linearity and response frequency better than 10 μm, 2% and 2 KHz, respectively. These results are quite promising regarding the application of these sensors to a wide variety of optical inspection systems where continuous quality control is required.
AB - This work presents the main static and dynamic performances showed by one dimensional thin film position sensitive detectors (1D TFPSD), based on a-Si:H technology, with a size of 80 mm × 5 mm. The results obtained show that the TFPSD is able to respond to light powers as low as 2μ W/cm2, presenting a detection accuracy, linearity and response frequency better than 10 μm, 2% and 2 KHz, respectively. These results are quite promising regarding the application of these sensors to a wide variety of optical inspection systems where continuous quality control is required.
UR - http://www.scopus.com/inward/record.url?scp=0030405610&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:0030405610
VL - 420
T3 - Materials Research Society Symposium - Proceedings
SP - 165
EP - 170
BT - Proceedings of the 1996 MRS Spring Symposium
A2 - Hack, M.
A2 - Schiff, E. A.
A2 - Wagner, F.
A2 - Schropp, R.
A2 - Matsuda, A.
PB - Materials Research Society
CY - Pittsburgh, PA, United States
Y2 - 8 April 1996 through 12 April 1996
ER -