From intelligent materials to smart sensors: a-Si:H position sensitive detectors

E. Fortunato, M. Fernandes, F. Soares, G. Lavareda, R. Martins

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review


This work presents the main static and dynamic performances showed by one dimensional thin film position sensitive detectors (1D TFPSD), based on a-Si:H technology, with a size of 80 mm × 5 mm. The results obtained show that the TFPSD is able to respond to light powers as low as 2μ W/cm2, presenting a detection accuracy, linearity and response frequency better than 10 μm, 2% and 2 KHz, respectively. These results are quite promising regarding the application of these sensors to a wide variety of optical inspection systems where continuous quality control is required.

Original languageEnglish
Title of host publicationProceedings of the 1996 MRS Spring Symposium
EditorsM. Hack, E. A. Schiff, F. Wagner, R. Schropp, A. Matsuda
Place of PublicationPittsburgh, PA, United States
PublisherMRS - Materials Research Society
Number of pages6
Publication statusPublished - 1996
EventMRS Spring Symposium - San Francisco, United States
Duration: 8 Apr 199612 Apr 1996

Publication series

NameMaterials Research Society Symposium - Proceedings
PublisherMaterials Research Society
ISSN (Print)0272-9172


ConferenceMRS Spring Symposium
Country/TerritoryUnited States
CitySan Francisco


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