Flexible large area thin film position sensitive detectors

Elvira Fortunato; Isabel Ferreira; Franco Giuliani; Rodrigo Martins

doi:10.1016/S0924-4247(00)00446-5

Flexible large area thin film position sensitive detectors

Elvira Fortunato, Isabel Ferreira, Franco Giuliani, Rodrigo Martins

Research output: Contribution to journal › Article › peer-review

19 Citations (Scopus)

Abstract

Large area thin film position sensitive detectors based on amorphous silicon technology have been prepared on polyimide substrates using the conventional plasma-enhanced chemical vapour deposition. The sensors have been characterized by spectral response, light intensity dependence and linearity measurements in a bent state in order to evaluate the properties in real working conditions. The obtained one-dimensional (1D) position sensors with 10 mm width and 20 mm length present a non-linearity of ±1% which are comparable to the ones produced on glass substrates.

Original language	English
Pages (from-to)	182-186
Number of pages	5
Journal	Sensors and Actuators A: Physical
Volume	86
Issue number	3
DOIs	https://doi.org/10.1016/S0924-4247(00)00446-5
Publication status	Published - 15 Nov 2000

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abstract = "Large area thin film position sensitive detectors based on amorphous silicon technology have been prepared on polyimide substrates using the conventional plasma-enhanced chemical vapour deposition. The sensors have been characterized by spectral response, light intensity dependence and linearity measurements in a bent state in order to evaluate the properties in real working conditions. The obtained one-dimensional (1D) position sensors with 10 mm width and 20 mm length present a non-linearity of ±1\% which are comparable to the ones produced on glass substrates.",

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AU - Fortunato, Elvira

AU - Ferreira, Isabel

AU - Giuliani, Franco

AU - Martins, Rodrigo

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N2 - Large area thin film position sensitive detectors based on amorphous silicon technology have been prepared on polyimide substrates using the conventional plasma-enhanced chemical vapour deposition. The sensors have been characterized by spectral response, light intensity dependence and linearity measurements in a bent state in order to evaluate the properties in real working conditions. The obtained one-dimensional (1D) position sensors with 10 mm width and 20 mm length present a non-linearity of ±1% which are comparable to the ones produced on glass substrates.

AB - Large area thin film position sensitive detectors based on amorphous silicon technology have been prepared on polyimide substrates using the conventional plasma-enhanced chemical vapour deposition. The sensors have been characterized by spectral response, light intensity dependence and linearity measurements in a bent state in order to evaluate the properties in real working conditions. The obtained one-dimensional (1D) position sensors with 10 mm width and 20 mm length present a non-linearity of ±1% which are comparable to the ones produced on glass substrates.

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U2 - 10.1016/S0924-4247(00)00446-5

DO - 10.1016/S0924-4247(00)00446-5

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JO - Sensors and Actuators A: Physical

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ER -

Flexible large area thin film position sensitive detectors

Abstract

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