13 Citations (Scopus)

Abstract

Large area thin film position sensitive detectors based on amorphous silicon technology have been prepared on polyimide substrates using the conventional plasma-enhanced chemical vapour deposition. The sensors have been characterized by spectral response, light intensity dependence and linearity measurements in a bent state in order to evaluate the properties in real working conditions. The obtained one-dimensional (1D) position sensors with 10 mm width and 20 mm length present a non-linearity of ±1% which are comparable to the ones produced on glass substrates.

Original languageEnglish
Pages (from-to)182-186
Number of pages5
JournalSensors And Actuators A-Physical
Volume86
Issue number3
DOIs
Publication statusPublished - 15 Nov 2000

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