Fast and cheap method to qualitatively measure the thickness and uniformity of ZrO2 thin films

Hugo Águas, António J. S. Marques, Rodrigo Martins, Elvira Fortunato

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

This work presents a fast method to determine qualitatively the uniformity and the thickness of transparent or semitransparent thin films in the visible to near-infrared region. The method proposed is based on the information recorded by a colour scanner in the form of coloured regions, due to the constructive interferences caused by multibeam wavelength light sources as function of the film thickness and refractive index. The method is well applied in transparent films, where the uniformity cannot be seen by visual inspection. This paper shows that the results obtained for ZrO2 films are satisfactory enabling the application of this technique to determine the films uniformity in fast and cheap way.

Original languageEnglish
Pages (from-to)319-321
Number of pages3
JournalMaterials Science in Semiconductor Processing
Volume4
Issue number1-3
DOIs
Publication statusPublished - 6 Feb 2001

Fingerprint Dive into the research topics of 'Fast and cheap method to qualitatively measure the thickness and uniformity of ZrO2 thin films'. Together they form a unique fingerprint.

  • Cite this