Abstract

We present the results obtained with anextended-gateISFET totallybasedonamorphousoxides(GIZO as the semiconductor, Ta2O5: SiO2 as the dielectric and Ta2O5 as the sensitive layer). A full characterization of the device was performed with constant ionic strength pH buffer solutions, revealing a sensitivity of 40 mV/pH with small hysteresis, and good linearity in the pH 4-pH 10 range buffer solutions. These results clearly show that it is possible to produce room-temperature disposable and low cost bio-sensors.
Original languageEnglish
Pages (from-to)729-734
JournalJournal Of Display Technology
Volume9
Issue number9
DOIs
Publication statusPublished - Sept 2013

Keywords

  • Amorphous oxides
  • ISFET
  • Ph sensors
  • Sensing layer
  • Sputtering
  • Ta-inf2-infO-inf5-inf

Fingerprint

Dive into the research topics of 'Extended-Gate ISFETs Based on Sputtered Amorphous Oxides'. Together they form a unique fingerprint.

Cite this