Evaluation of the optoelectronic properties and corrosion behavior of Al2O3-doped ZnO films prepared by dc pulsed magnetron sputtering

C. Zubizarreta, E. G-Berasategui, R. Bayón, R Escobar Galindo, Raquel Barros, Diana Gaspar, D. Nunes, Tomas Calmeiro, Rodrigo Ferrão de Paiva Martins, Elvira Maria Correia Fortunato, J. Barriga

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

The main requirements for transparent conducting oxide (TCO) films acting as electrodes are a high transmission rate in the visible spectral region and low resistivity. However, in many cases, tolerance to temperature and humidity exposure is also an important requirement to be fulfilled by the TCOs to assure proper operation and durability. Besides improving current encapsulation methods, the corrosion resistance of the developed TCOs must also be enhanced to warrant the performance of optoelectronic devices.
In this paper the performance of aluminum-doped zinc oxide (AZO) films deposited by pulsed dc magnetron sputtering has been studied. Structure, optical transmittance/reflectance, electrical properties (resistivity, carrier concentration and mobility) and corrosion resistance of the developed coatings have been analyzed as a function of the doping of the target and the coating thickness. Films grown from a 2.0 wt% Al2O3 target with a thickness of approximately 1 mu m showed a very low resistivity of 6.54 x 10(-4) Omega cm and a high optical transmittance in the visible range of 84%. Corrosion studies of the developed samples have shown very low corrosion currents (nanoamperes), very high corrosion resistances (in the order of 10(7) Omega) and very high electrochemical stability, indicating no tendency for electrochemical corrosion degradation.
Original languageEnglish
Article number485501
JournalJournal Of Physics D-Applied Physics
Volume47
Issue number48
DOIs
Publication statusPublished - 13 Nov 2014

Fingerprint

corrosion resistance
Optoelectronic devices
Magnetron sputtering
Corrosion resistance
corrosion
magnetron sputtering
Opacity
Corrosion
electrical resistivity
Oxide films
oxide films
evaluation
transmittance
Zinc Oxide
electrochemical corrosion
coatings
Coatings
requirements
Electrochemical corrosion
Carrier mobility

Keywords

  • AZO
  • PVD
  • electrochemical impedance
  • polarization
  • optoelectronics

Cite this

Zubizarreta, C. ; G-Berasategui, E. ; Bayón, R. ; Galindo, R Escobar ; Barros, Raquel ; Gaspar, Diana ; Nunes, D. ; Calmeiro, Tomas ; Martins, Rodrigo Ferrão de Paiva ; Fortunato, Elvira Maria Correia ; Barriga, J. / Evaluation of the optoelectronic properties and corrosion behavior of Al2O3-doped ZnO films prepared by dc pulsed magnetron sputtering. In: Journal Of Physics D-Applied Physics. 2014 ; Vol. 47, No. 48.
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Evaluation of the optoelectronic properties and corrosion behavior of Al2O3-doped ZnO films prepared by dc pulsed magnetron sputtering. / Zubizarreta, C.; G-Berasategui, E.; Bayón, R.; Galindo, R Escobar ; Barros, Raquel; Gaspar, Diana; Nunes, D.; Calmeiro, Tomas; Martins, Rodrigo Ferrão de Paiva; Fortunato, Elvira Maria Correia; Barriga, J.

In: Journal Of Physics D-Applied Physics, Vol. 47, No. 48, 485501, 13.11.2014.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Evaluation of the optoelectronic properties and corrosion behavior of Al2O3-doped ZnO films prepared by dc pulsed magnetron sputtering

AU - Zubizarreta, C.

AU - G-Berasategui, E.

AU - Bayón, R.

AU - Galindo, R Escobar

AU - Barros, Raquel

AU - Gaspar, Diana

AU - Nunes, D.

AU - Calmeiro, Tomas

AU - Martins, Rodrigo Ferrão de Paiva

AU - Fortunato, Elvira Maria Correia

AU - Barriga, J.

N1 - Sem PDF. European Commission (314233) ERC Advanced Grant (INVISIBLE) (228144) Spanish Ministry of Science and Innovation (CSD2008-00023 FUNCOAT) Portuguese Science Foundation (FCT-MEC) (EXCL/CTM-NAN/0201/2012; PEst-C/CTM/LA0025/2013-14)

PY - 2014/11/13

Y1 - 2014/11/13

N2 - The main requirements for transparent conducting oxide (TCO) films acting as electrodes are a high transmission rate in the visible spectral region and low resistivity. However, in many cases, tolerance to temperature and humidity exposure is also an important requirement to be fulfilled by the TCOs to assure proper operation and durability. Besides improving current encapsulation methods, the corrosion resistance of the developed TCOs must also be enhanced to warrant the performance of optoelectronic devices. In this paper the performance of aluminum-doped zinc oxide (AZO) films deposited by pulsed dc magnetron sputtering has been studied. Structure, optical transmittance/reflectance, electrical properties (resistivity, carrier concentration and mobility) and corrosion resistance of the developed coatings have been analyzed as a function of the doping of the target and the coating thickness. Films grown from a 2.0 wt% Al2O3 target with a thickness of approximately 1 mu m showed a very low resistivity of 6.54 x 10(-4) Omega cm and a high optical transmittance in the visible range of 84%. Corrosion studies of the developed samples have shown very low corrosion currents (nanoamperes), very high corrosion resistances (in the order of 10(7) Omega) and very high electrochemical stability, indicating no tendency for electrochemical corrosion degradation.

AB - The main requirements for transparent conducting oxide (TCO) films acting as electrodes are a high transmission rate in the visible spectral region and low resistivity. However, in many cases, tolerance to temperature and humidity exposure is also an important requirement to be fulfilled by the TCOs to assure proper operation and durability. Besides improving current encapsulation methods, the corrosion resistance of the developed TCOs must also be enhanced to warrant the performance of optoelectronic devices. In this paper the performance of aluminum-doped zinc oxide (AZO) films deposited by pulsed dc magnetron sputtering has been studied. Structure, optical transmittance/reflectance, electrical properties (resistivity, carrier concentration and mobility) and corrosion resistance of the developed coatings have been analyzed as a function of the doping of the target and the coating thickness. Films grown from a 2.0 wt% Al2O3 target with a thickness of approximately 1 mu m showed a very low resistivity of 6.54 x 10(-4) Omega cm and a high optical transmittance in the visible range of 84%. Corrosion studies of the developed samples have shown very low corrosion currents (nanoamperes), very high corrosion resistances (in the order of 10(7) Omega) and very high electrochemical stability, indicating no tendency for electrochemical corrosion degradation.

KW - AZO

KW - PVD

KW - electrochemical impedance

KW - polarization

KW - optoelectronics

U2 - 10.1088/0022-3727/47/48/485501

DO - 10.1088/0022-3727/47/48/485501

M3 - Article

VL - 47

JO - Journal Of Physics D-Applied Physics

JF - Journal Of Physics D-Applied Physics

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