Estimating the uncertainties of strain and damage analysis by X-ray diffraction in ion implanted MoO3

D. R. Pereira; Sérgio Magalhães; C. Díaz-Guerra; Marco Peres; João Guilherme  Correia; José G. Marques; Ana Gomes Silva; Eduardo Alves; Susana Cardoso; Paulo P. Freitas; Katharina Lorenz

doi:10.1016/j.nimb.2020.07.016

Estimating the uncertainties of strain and damage analysis by X-ray diffraction in ion implanted MoO₃

D. R. Pereira, Sérgio Magalhães, C. Díaz-Guerra, Marco Peres, João Guilherme Correia, José G. Marques, Ana Gomes Silva, Eduardo Alves, Susana Cardoso, Paulo P. Freitas, Katharina Lorenz

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2 Citations (Scopus)

Abstract

Ion implantation of oxygen in MoO₃ lamellar crystals allows tuning their electrical conductivity by defect formation. X-ray diffraction (XRD) is a particularly sensitive technique to study such defects that cause changes in the lattice parameters and crystal quality. In this work, dynamical theory was applied to fit XRD patterns to obtain the strain and static Debye-Waller (DW) factor distributions as a function of depth. A two-step method was tested to estimate the uncertainties of these parameters within a certain region of interest. The limitations of the XRD characterization to study regions with low values of static DW factor are discussed.

Original language	English
Pages (from-to)	290-296
Number of pages	7
Journal	Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Volume	478
DOIs	https://doi.org/10.1016/j.nimb.2020.07.016
Publication status	Published - 1 Sept 2020

Keywords

Ion implantation
Molybdenum oxide
Static Debye-Waller (DW) factor
Strain
X-ray Diffraction (XRD)

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Pereira, D. R., Magalhães, S., Díaz-Guerra, C., Peres, M., Correia, J. G., Marques, J. G., Silva, A. G., Alves, E., Cardoso, S., Freitas, P. P., & Lorenz, K. (2020). Estimating the uncertainties of strain and damage analysis by X-ray diffraction in ion implanted MoO₃. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 478, 290-296. https://doi.org/10.1016/j.nimb.2020.07.016

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title = "Estimating the uncertainties of strain and damage analysis by X-ray diffraction in ion implanted MoO3",

abstract = "Ion implantation of oxygen in MoO3 lamellar crystals allows tuning their electrical conductivity by defect formation. X-ray diffraction (XRD) is a particularly sensitive technique to study such defects that cause changes in the lattice parameters and crystal quality. In this work, dynamical theory was applied to fit XRD patterns to obtain the strain and static Debye-Waller (DW) factor distributions as a function of depth. A two-step method was tested to estimate the uncertainties of these parameters within a certain region of interest. The limitations of the XRD characterization to study regions with low values of static DW factor are discussed.",

keywords = "Ion implantation, Molybdenum oxide, Static Debye-Waller (DW) factor, Strain, X-ray Diffraction (XRD)",

author = "Pereira, {D. R.} and S{\'e}rgio Magalh{\~a}es and C. D{\'i}az-Guerra and Marco Peres and Correia, {Jo{\~a}o Guilherme} and Marques, {Jos{\'e} G.} and Silva, {Ana Gomes} and Eduardo Alves and Susana Cardoso and Freitas, {Paulo P.} and Katharina Lorenz",

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year = "2020",

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doi = "10.1016/j.nimb.2020.07.016",

language = "English",

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Pereira, DR, Magalhães, S, Díaz-Guerra, C, Peres, M, Correia, JG, Marques, JG, Silva, AG, Alves, E, Cardoso, S, Freitas, PP & Lorenz, K 2020, 'Estimating the uncertainties of strain and damage analysis by X-ray diffraction in ion implanted MoO₃', Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, vol. 478, pp. 290-296. https://doi.org/10.1016/j.nimb.2020.07.016

Estimating the uncertainties of strain and damage analysis by X-ray diffraction in ion implanted MoO₃. / Pereira, D. R.; Magalhães, Sérgio; Díaz-Guerra, C. et al.
In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 478, 01.09.2020, p. 290-296.

Research output: Contribution to journal › Article › peer-review

TY - JOUR

T1 - Estimating the uncertainties of strain and damage analysis by X-ray diffraction in ion implanted MoO3

AU - Pereira, D. R.

AU - Magalhães, Sérgio

AU - Díaz-Guerra, C.

AU - Peres, Marco

AU - Correia, João Guilherme

AU - Marques, José G.

AU - Silva, Ana Gomes

AU - Alves, Eduardo

AU - Cardoso, Susana

AU - Freitas, Paulo P.

AU - Lorenz, Katharina

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PY - 2020/9/1

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N2 - Ion implantation of oxygen in MoO3 lamellar crystals allows tuning their electrical conductivity by defect formation. X-ray diffraction (XRD) is a particularly sensitive technique to study such defects that cause changes in the lattice parameters and crystal quality. In this work, dynamical theory was applied to fit XRD patterns to obtain the strain and static Debye-Waller (DW) factor distributions as a function of depth. A two-step method was tested to estimate the uncertainties of these parameters within a certain region of interest. The limitations of the XRD characterization to study regions with low values of static DW factor are discussed.

AB - Ion implantation of oxygen in MoO3 lamellar crystals allows tuning their electrical conductivity by defect formation. X-ray diffraction (XRD) is a particularly sensitive technique to study such defects that cause changes in the lattice parameters and crystal quality. In this work, dynamical theory was applied to fit XRD patterns to obtain the strain and static Debye-Waller (DW) factor distributions as a function of depth. A two-step method was tested to estimate the uncertainties of these parameters within a certain region of interest. The limitations of the XRD characterization to study regions with low values of static DW factor are discussed.

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KW - Molybdenum oxide

KW - Static Debye-Waller (DW) factor

KW - Strain

KW - X-ray Diffraction (XRD)

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DO - 10.1016/j.nimb.2020.07.016

M3 - Article

AN - SCOPUS:85088914042

SN - 0168-583X

VL - 478

SP - 290

EP - 296

JO - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

ER -

Estimating the uncertainties of strain and damage analysis by X-ray diffraction in ion implanted MoO₃

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