Energy efficient micro-machined thermal flow-rate sensor based on transient operation mode

Ferdous Shaun, Sreyash Sarkar, Hany Ali, Patrick Poulichet, Francesco Peressutti, Frédéric Marty, Tarik Bourouina, Elyes Nefzaoui, João Pedro Oliveira

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Citations (Scopus)

Abstract

We report on a micro-machined thermos-resistive flowrate sensor optimization with respect to energy consumption while using a large thermal conductivity substrate, silicon for instance. Two aspects of the device are optimized for this purpose: its geometry and its operating scheme. Large thermal conductivity materials are not recommended for thermal flowrate sensors since they induce large thermal leakage. However, they can be needed for some lab-on-chip devices where the co-integration of several sensors and components is the main constraint. Under these conditions, we show that the flow-rate sensor thermal efficiency can be increased by geometric optimization and its energy consumption significantly reduced by operating the device in transient mode. The original reference device is fabricated on bulk silicon where the heating element is made of platinum (Pt). Then, a geometric optimization is performed to increase the heating resistor thermal insulation by creating a micro-pillar in the middle of a cavity to support the heater. The pillar structure flow-rate sensor exhibits 2.5 °C temperature under no-flow while the bulk silicon-based sensor shows 0.8 °C only under 30 mA current supply. This larger temperature increase under no flow leads to a larger sensitivity of the former. In addition, transient operating mode enables the minimization of the pre-measurement waiting time, hence a reduction of the device energy consumption. While a steady-state measurement requires a heating time of the order of 20 minutes, a transient mode measurement can be performed after a heating time lower than 3 minutes.

Original languageEnglish
Title of host publicationSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018
EditorsRomolo Marcelli, Yoshio Mita, Stewart Smith, Francis Pressecq, Pascal Nouet, Frederick Mailly, Peter Schneider
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1-3
Number of pages3
ISBN (Electronic)9781538661994
DOIs
Publication statusPublished - 22 Jun 2018
Event20th Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2018 - Roma, Italy
Duration: 22 May 201825 May 2018

Conference

Conference20th Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2018
CountryItaly
CityRoma
Period22/05/1825/05/18

Keywords

  • Energy efficiency
  • Flow-rate
  • MEMS
  • Thermal sensor
  • Transient

Fingerprint

Dive into the research topics of 'Energy efficient micro-machined thermal flow-rate sensor based on transient operation mode'. Together they form a unique fingerprint.

Cite this