Energy analysis in positive SIMS with Cs+ beams

O. M. N. D. Teodoro; M. J. P. Maneira; A. M. C. Moutinho

doi:10.1016/0042-207X(94)90333-6

Energy analysis in positive SIMS with Cs⁺ beams

O. M. N. D. Teodoro, M. J. P. Maneira, A. M. C. Moutinho

DF – Departamento de Física

Research output: Contribution to journal › Article › peer-review

Abstract

A study using a primary Cs⁺ beam to carry out positive SIMS on conductive samples is presented. The energy distribution of positive secondary ions was measured and the sputter yield, S⁺ was calculated for several elements. The significantly different energetic behavior found between the secondary cesium ions and those ejected from the target will be discussed. Finally, the best conditions to perform positive SIMS with such a primary beam will be described.

Original language	English
Pages (from-to)	15-18
Number of pages	4
Journal	Vacuum
Volume	45
Issue number	1
DOIs	https://doi.org/10.1016/0042-207X(94)90333-6
Publication status	Published - 1 Jan 1994

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title = "Energy analysis in positive SIMS with Cs+ beams",

abstract = "A study using a primary Cs+ beam to carry out positive SIMS on conductive samples is presented. The energy distribution of positive secondary ions was measured and the sputter yield, S+ was calculated for several elements. The significantly different energetic behavior found between the secondary cesium ions and those ejected from the target will be discussed. Finally, the best conditions to perform positive SIMS with such a primary beam will be described.",

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AU - Teodoro, O. M. N. D.

AU - Maneira, M. J. P.

AU - Moutinho, A. M. C.

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Y1 - 1994/1/1

N2 - A study using a primary Cs+ beam to carry out positive SIMS on conductive samples is presented. The energy distribution of positive secondary ions was measured and the sputter yield, S+ was calculated for several elements. The significantly different energetic behavior found between the secondary cesium ions and those ejected from the target will be discussed. Finally, the best conditions to perform positive SIMS with such a primary beam will be described.

AB - A study using a primary Cs+ beam to carry out positive SIMS on conductive samples is presented. The energy distribution of positive secondary ions was measured and the sputter yield, S+ was calculated for several elements. The significantly different energetic behavior found between the secondary cesium ions and those ejected from the target will be discussed. Finally, the best conditions to perform positive SIMS with such a primary beam will be described.

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U2 - 10.1016/0042-207X(94)90333-6

DO - 10.1016/0042-207X(94)90333-6

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SN - 0042-207X

VL - 45

SP - 15

EP - 18

JO - Vacuum

JF - Vacuum

IS - 1

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Energy analysis in positive SIMS with Cs⁺ beams

Abstract

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