Energy analysis in positive SIMS with Cs+ beams

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A study using a primary Cs+ beam to carry out positive SIMS on conductive samples is presented. The energy distribution of positive secondary ions was measured and the sputter yield, S+ was calculated for several elements. The significantly different energetic behavior found between the secondary cesium ions and those ejected from the target will be discussed. Finally, the best conditions to perform positive SIMS with such a primary beam will be described.

Original languageEnglish
Pages (from-to)15-18
Number of pages4
Issue number1
Publication statusPublished - 1 Jan 1994


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