Electrical performances of low temperature annealed hafnium oxide deposited at room temperature

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Citation (Scopus)
Original languageEnglish
Title of host publicationMaterials Science Forum - Advanced Materials Forum III
Pages58-62
Number of pages5
Volume514-516
Publication statusPublished - 1 Jan 2006
EventMateriais 2005 -
Duration: 1 Jan 2005 → …

Conference

ConferenceMateriais 2005
Period1/01/05 → …

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