Effect of rf power on the properties of ITO thin films deposited by plasma enhanced reactive thermal evaporation on unheated polymer substrates

Carlos Alberto Nunes de Carvalho; A. M. Luís; O. Conde; Elvira Maria Correia Fortunato; Guilherme António Rodrigues Lavareda; Ana Amaral

Effect of rf power on the properties of ITO thin films deposited by plasma enhanced reactive thermal evaporation on unheated polymer substrates

Carlos Alberto Nunes de Carvalho, A. M. Luís, O. Conde, Elvira Maria Correia Fortunato, Guilherme António Rodrigues Lavareda, Ana Amaral

DCM - Departamento de Ciência dos Materiais

Research output: Contribution to journal › Article

20 Citations (Scopus)

Original language	English
Pages (from-to)	1208-1212
Number of pages	5
Journal	Journal of Non-Crystalline Solids
Volume	299-302
Issue number	PART 2
Publication status	Published - Apr 2002

Cite this

Carvalho, Carlos Alberto Nunes de ; Luís, A. M. ; Conde, O. ; Fortunato, Elvira Maria Correia ; Lavareda, Guilherme António Rodrigues ; Amaral, Ana. / Effect of rf power on the properties of ITO thin films deposited by plasma enhanced reactive thermal evaporation on unheated polymer substrates. In: Journal of Non-Crystalline Solids. 2002 ; Vol. 299-302, No. PART 2. pp. 1208-1212.

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author = "Carvalho, {Carlos Alberto Nunes de} and Lu{\'i}s, {A. M.} and O. Conde and Fortunato, {Elvira Maria Correia} and Lavareda, {Guilherme Ant{\'o}nio Rodrigues} and Ana Amaral",

year = "2002",

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language = "English",

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pages = "1208--1212",

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publisher = "Elsevier Science B.V., Amsterdam.",

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Effect of rf power on the properties of ITO thin films deposited by plasma enhanced reactive thermal evaporation on unheated polymer substrates. / Carvalho, Carlos Alberto Nunes de; Luís, A. M.; Conde, O.; Fortunato, Elvira Maria Correia ; Lavareda, Guilherme António Rodrigues; Amaral, Ana.

In: Journal of Non-Crystalline Solids, Vol. 299-302, No. PART 2, 04.2002, p. 1208-1212.

Research output: Contribution to journal › Article

TY - JOUR

T1 - Effect of rf power on the properties of ITO thin films deposited by plasma enhanced reactive thermal evaporation on unheated polymer substrates

AU - Carvalho, Carlos Alberto Nunes de

AU - Luís, A. M.

AU - Conde, O.

AU - Fortunato, Elvira Maria Correia

AU - Lavareda, Guilherme António Rodrigues

AU - Amaral, Ana

PY - 2002/4

Y1 - 2002/4

M3 - Article

VL - 299-302

SP - 1208

EP - 1212

JO - Journal of Non-Crystalline Solids

JF - Journal of Non-Crystalline Solids

SN - 0022-3093

IS - PART 2

ER -