Effect of deposition conditions upon gas sensitivity of zinc oxide thin films deposited by spray pyrolysis

P. Nunes, E. Fortunato, P. Vilarinho, R. Martins

Research output: Contribution to journalArticle

Abstract

In this work we present the results of a study concerning the role of the properties of zinc oxide thin films deposited by spray pyrolysis on its sensitivity to methane or ethane. It was found that using highly resistive thin layers leads to an increase in the film sensitivity. The variation of the operating temperature of the film leads to a significant change in the sensitivity of the sensor and the ideal operating temperature dependence of the gas used. The sensitivity of the ZnO thin films changes linear with the increase of the gas concentration. However these films seem to be more appropriated for the detection of methane than for ethane since the value of sensitivity obtained are higher and its variation with the gas concentration more pronounced. After the annealing treatment performed the films sensitivity decreases.

Original languageEnglish
Pages (from-to)151-154
Number of pages4
JournalSolid State Phenomena
Volume80-81
Publication statusPublished - 2001

Keywords

  • Ethane
  • Gas sensors
  • Methane
  • Spray pyrolysis
  • ZnO

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