Effect of annealing on the properties of N-doped ZnO films deposited by RF magnetron sputtering

Jinzhong Wang; Elangovan Elamurugu; Vincent Sallet; François Jomard; Alain Lusson; Ana M. Botelho Do Rego; Pedro Miguel Cândido Barquinha; G Gonçalves; Rodrigo Ferrão de Paiva Martins; Elvira Maria Correia Fortunato

doi:10.1016/j.apsusc.2008.05.321

Effect of annealing on the properties of N-doped ZnO films deposited by RF magnetron sputtering

Jinzhong Wang, Elangovan Elamurugu, Vincent Sallet, François Jomard, Alain Lusson , Ana M. Botelho Do Rego, Pedro Miguel Cândido Barquinha, G Gonçalves, Rodrigo Ferrão de Paiva Martins, Elvira Maria Correia Fortunato

Research output: Contribution to journal › Article › peer-review

28 Citations (Scopus)

Original language	English
Pages (from-to)	7178-7182
Number of pages	5
Journal	Applied Surface Science
Volume	254
Issue number	22
DOIs	https://doi.org/10.1016/j.apsusc.2008.05.321
Publication status	Published - 15 Sept 2008

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10.1016/j.apsusc.2008.05.321

Cite this

@article{36f9300dc9434154a55463c03f09f8a4,

title = "Effect of annealing on the properties of N-doped ZnO films deposited by RF magnetron sputtering",

author = "Jinzhong Wang and Elangovan Elamurugu and Vincent Sallet and Fran{\c c}ois Jomard and Alain Lusson and {Botelho Do Rego}, {Ana M.} and Barquinha, {Pedro Miguel C{\^a}ndido} and G Gon{\c c}alves and Martins, {Rodrigo Ferr{\~a}o de Paiva} and Fortunato, {Elvira Maria Correia}",

year = "2008",

month = sep,

day = "15",

doi = "10.1016/j.apsusc.2008.05.321",

language = "English",

volume = "254",

pages = "7178--7182",

journal = "Applied Surface Science",

issn = "0169-4332",

publisher = "North-Holland | Elsevier",

number = "22",

}

TY - JOUR

T1 - Effect of annealing on the properties of N-doped ZnO films deposited by RF magnetron sputtering

AU - Wang, Jinzhong

AU - Elamurugu, Elangovan

AU - Sallet, Vincent

AU - Jomard, François

AU - Lusson , Alain

AU - Botelho Do Rego, Ana M.

AU - Barquinha, Pedro Miguel Cândido

AU - Gonçalves, G

AU - Martins, Rodrigo Ferrão de Paiva

AU - Fortunato, Elvira Maria Correia

PY - 2008/9/15

Y1 - 2008/9/15

U2 - 10.1016/j.apsusc.2008.05.321

DO - 10.1016/j.apsusc.2008.05.321

M3 - Article

SN - 0169-4332

VL - 254

SP - 7178

EP - 7182

JO - Applied Surface Science

JF - Applied Surface Science

IS - 22

ER -