TY - JOUR
T1 - Effect of an interfacial oxide layer in the annealing behaviour of Au/a-Si : H MIS photodiodes
AU - Águas, Hugo Manuel Brito
AU - Pereira, Luis Miguel Nunes
AU - Ferreira, Isabel Maria Mercês
AU - Ramos, Ariel Rita L.
AU - Viana, A. S.
AU - Andreu, Jordi
AU - Vilarinho, Paula
AU - Fortunato, Elvira Maria Correia
AU - Martins, Rodrigo Ferrão de Paiva
PY - 2004/6/15
Y1 - 2004/6/15
N2 - This work presents a study on the effect of an interfacial silicon oxide layer placed between Au and a-Si:H MIS (metal-insulator-semiconductor) photodiodes in their performances, by stopping the Au diffusion towards the a-Si:H. The results show that the Au diffuses very easily to the oxide free a-Si:H surface, even at room temperature, degrading the photodiode performance. On the other hand, the MIS photodiodes with the interfacial oxide show an improvement of their characteristics after annealing, function of its thickness, and degree of film's compactness. This effect is associated with the presence of oxide of thicknesses ⩾5 Å at the Au/a-Si:H interface that prevents the Au diffusion and improves the photodiode characteristics, which does not happen when the interfacial oxide is absent
AB - This work presents a study on the effect of an interfacial silicon oxide layer placed between Au and a-Si:H MIS (metal-insulator-semiconductor) photodiodes in their performances, by stopping the Au diffusion towards the a-Si:H. The results show that the Au diffuses very easily to the oxide free a-Si:H surface, even at room temperature, degrading the photodiode performance. On the other hand, the MIS photodiodes with the interfacial oxide show an improvement of their characteristics after annealing, function of its thickness, and degree of film's compactness. This effect is associated with the presence of oxide of thicknesses ⩾5 Å at the Au/a-Si:H interface that prevents the Au diffusion and improves the photodiode characteristics, which does not happen when the interfacial oxide is absent
U2 - 10.1016/j.jnoncrysol.2004.03.097
DO - 10.1016/j.jnoncrysol.2004.03.097
M3 - Article
SN - 0022-3093
VL - 338-40
SP - 810
EP - 813
JO - Journal of Non-Crystalline Solids
JF - Journal of Non-Crystalline Solids
IS - 1 SPEC. ISS.
ER -