Dissociation of the FEBID precursor: Cis-Pt(CO)2Cl2 driven by low-energy electrons

Filipe Ferreira Da Silva; Rachel M. Thorman; Ragnar Bjornsson; Hang Lu; Lisa Mcelwee-White; Oddur Ingólfsson

doi:10.1039/c9cp06633k

Dissociation of the FEBID precursor: Cis-Pt(CO)2Cl2 driven by low-energy electrons

Filipe Ferreira Da Silva, Rachel M. Thorman, Ragnar Bjornsson, Hang Lu, Lisa Mcelwee-White, Oddur Ingólfsson

Research output: Contribution to journal › Article › peer-review

11 Citations (Scopus)

Abstract

In this study, we present experimental and theoretical results on dissociative electron attachment and dissociative ionisation for the potential FEBID precursor cis-Pt(CO)₂Cl₂. UHV surface studies have shown that high purity platinum deposits can be obtained from cis-Pt(CO)₂Cl₂. The efficiency and energetics of ligand removal through these processes are discussed and experimental appearance energies are compared to calculated thermochemical thresholds. The present results demonstrate the potential effectiveness of electron-induced reactions in the deposition of this FEBID precursor, and these are discussed in conjunction with surface science studies on this precursor and the design of new FEBID precursors.

Original language	English
Pages (from-to)	6100-6108
Number of pages	9
Journal	Physical Chemistry Chemical Physics
Volume	22
Issue number	11
DOIs	https://doi.org/10.1039/c9cp06633k
Publication status	Published - 21 Mar 2020

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title = "Dissociation of the FEBID precursor: Cis-Pt(CO)2Cl2 driven by low-energy electrons",

abstract = "In this study, we present experimental and theoretical results on dissociative electron attachment and dissociative ionisation for the potential FEBID precursor cis-Pt(CO)2Cl2. UHV surface studies have shown that high purity platinum deposits can be obtained from cis-Pt(CO)2Cl2. The efficiency and energetics of ligand removal through these processes are discussed and experimental appearance energies are compared to calculated thermochemical thresholds. The present results demonstrate the potential effectiveness of electron-induced reactions in the deposition of this FEBID precursor, and these are discussed in conjunction with surface science studies on this precursor and the design of new FEBID precursors.",

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AU - Ferreira Da Silva, Filipe

AU - Thorman, Rachel M.

AU - Bjornsson, Ragnar

AU - Lu, Hang

AU - Mcelwee-White, Lisa

AU - Ingólfsson, Oddur

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N2 - In this study, we present experimental and theoretical results on dissociative electron attachment and dissociative ionisation for the potential FEBID precursor cis-Pt(CO)2Cl2. UHV surface studies have shown that high purity platinum deposits can be obtained from cis-Pt(CO)2Cl2. The efficiency and energetics of ligand removal through these processes are discussed and experimental appearance energies are compared to calculated thermochemical thresholds. The present results demonstrate the potential effectiveness of electron-induced reactions in the deposition of this FEBID precursor, and these are discussed in conjunction with surface science studies on this precursor and the design of new FEBID precursors.

AB - In this study, we present experimental and theoretical results on dissociative electron attachment and dissociative ionisation for the potential FEBID precursor cis-Pt(CO)2Cl2. UHV surface studies have shown that high purity platinum deposits can be obtained from cis-Pt(CO)2Cl2. The efficiency and energetics of ligand removal through these processes are discussed and experimental appearance energies are compared to calculated thermochemical thresholds. The present results demonstrate the potential effectiveness of electron-induced reactions in the deposition of this FEBID precursor, and these are discussed in conjunction with surface science studies on this precursor and the design of new FEBID precursors.

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EP - 6108

JO - Physical Chemistry Chemical Physics

JF - Physical Chemistry Chemical Physics

IS - 11

ER -

Dissociation of the FEBID precursor: Cis-Pt(CO)2Cl2 driven by low-energy electrons

Abstract

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