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Dependence of the strains and residual mechanical stresses on the performances presented by a-Si: H thin film position sensors
E. Fortunato, D. Brida, L. Pereira, H. Águas, V. Silva, I. Ferreira, M. F M Costa, V. Teixeira, R. Martins
Research output: Contribution to journal › Article › peer-review
8
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(Scopus)