Dependence of the strains and residual mechanical stresses on the performances presented by a-Si: H thin film position sensors

E. Fortunato, D. Brida, L. Pereira, H. Águas, V. Silva, I. Ferreira, M. F M Costa, V. Teixeira, R. Martins

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

The influence of residual stresses on the performances of large area position sensitive detectors produced on flexible substrates are presented here. For evaluating the residual stresses, two main techniques were used: An active optical triangulation and angle resolved scattering and the constant photocurrent method (CPM). From the results it was possible to correlate the stresses and the density of defects present in the films.

Original languageEnglish
Pages (from-to)612-616
Number of pages5
JournalAdvanced Engineering Materials
Volume4
Issue number8
DOIs
Publication statusPublished - Aug 2002

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