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Dependence of optical properties on composition of silicon carbonitride thin films deposited at low temperature by PECVD
Guilherme Lavareda, Yuri Vygranenko, Ana Amaral, Carlos Nunes de Carvalho, Nuno Pessoa Barradas, Eduardo Alves, Pedro Brogueira
Research output: Contribution to journal › Article › peer-review
2
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(Scopus)