Cylindrical hot cathode ionisation gauge: The concept and simulations

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Abstract

A novel design of an ionisation vacuum gauge is presented, aiming to achieve predictable sensitivity and high accuracy in high and the ultra-high vacuum range. The proposed design features a belt-like electron beam emitted from a linear filament, following a circular trajectory between two cylindrical electrodes, resembling a cylindrical analyser. The proposed design offers several key upsides: a precisely defined electron beam trajectory with reduced susceptibility to path variations, effective electron collection in a Faraday cup able to contain secondary emissions and backscattered electrons, and the inclusion of a suppressor grid in front of the ion collector to eliminate ion-induced secondary electron emission. These features are expected to secure high stability of the gauge and the low pressure limit. An in-depth description of the design is presented, along with the discussions on simulations of the key components that provide the improved performance.
Original languageEnglish
Article number112701
Number of pages11
JournalVacuum
Volume219
DOIs
Publication statusPublished - Jan 2024

Keywords

  • Accuracy
  • Ionisation vacuum gauge
  • SIMION
  • Simulation

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