Composition, structure and optical characteristics of polymorphous silicon films deposited by PECVD at 27.12 MHz

Rodrigo Ferrão de Paiva Martins; Hugo Manuel Brito Águas; Isabel Maria Mercês Ferreira; Elvira Maria Correia Fortunato; Pere Roca i Cabarrocas

doi:10.4028/www.scientific.net/MSF.455-456.100

Composition, structure and optical characteristics of polymorphous silicon films deposited by PECVD at 27.12 MHz

Rodrigo Ferrão de Paiva Martins, Hugo Manuel Brito Águas, Isabel Maria Mercês Ferreira, Elvira Maria Correia Fortunato, Pere Roca i Cabarrocas

DCM - Departamento de Ciência dos Materiais

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Original language	English
Pages (from-to)	100-103
Number of pages	4
Journal	Advanced Materials Forum Iii, Pts 1 And 2
Volume	455-456
Issue number	NA
DOIs	https://doi.org/10.4028/www.scientific.net/MSF.455-456.100
Publication status	Published - 1 Jan 2004

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10.4028/www.scientific.net/MSF.455-456.100

Cite this

@article{a5df0b777b344858bb9394478fdaf5dc,

title = "Composition, structure and optical characteristics of polymorphous silicon films deposited by PECVD at 27.12 MHz",

author = "Martins, {Rodrigo Ferr{\~a}o de Paiva} and {\'A}guas, {Hugo Manuel Brito} and Ferreira, {Isabel Maria Merc{\^e}s} and Fortunato, {Elvira Maria Correia} and {Roca i Cabarrocas}, Pere",

year = "2004",

month = jan,

day = "1",

doi = "10.4028/www.scientific.net/MSF.455-456.100",

language = "English",

volume = "455-456",

pages = "100--103",

journal = "Advanced Materials Forum Iii, Pts 1 And 2",

issn = "0255-5476",

publisher = "Transtec Publications; 1999",

number = "NA",

}

Composition, structure and optical characteristics of polymorphous silicon films deposited by PECVD at 27.12 MHz. / Martins, Rodrigo Ferrão de Paiva ; Águas, Hugo Manuel Brito ; Ferreira, Isabel Maria Mercês et al.
In: Advanced Materials Forum Iii, Pts 1 And 2, Vol. 455-456, No. NA, 01.01.2004, p. 100-103.

Research output: Contribution to journal › Article › peer-review

TY - JOUR

T1 - Composition, structure and optical characteristics of polymorphous silicon films deposited by PECVD at 27.12 MHz

AU - Martins, Rodrigo Ferrão de Paiva

AU - Águas, Hugo Manuel Brito

AU - Ferreira, Isabel Maria Mercês

AU - Fortunato, Elvira Maria Correia

AU - Roca i Cabarrocas, Pere

PY - 2004/1/1

Y1 - 2004/1/1

U2 - 10.4028/www.scientific.net/MSF.455-456.100

DO - 10.4028/www.scientific.net/MSF.455-456.100

M3 - Article

SN - 0255-5476

VL - 455-456

SP - 100

EP - 103

JO - Advanced Materials Forum Iii, Pts 1 And 2

JF - Advanced Materials Forum Iii, Pts 1 And 2

IS - NA

ER -