Original language | English |
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Pages (from-to) | 100-103 |
Number of pages | 4 |
Journal | Advanced Materials Forum Iii, Pts 1 And 2 |
Volume | 455-456 |
Issue number | NA |
DOIs | |
Publication status | Published - 1 Jan 2004 |
Composition, structure and optical characteristics of polymorphous silicon films deposited by PECVD at 27.12 MHz
Rodrigo Ferrão de Paiva Martins, Hugo Manuel Brito Águas, Isabel Maria Mercês Ferreira, Elvira Maria Correia Fortunato, Pere Roca i Cabarrocas
Research output: Contribution to journal › Article › peer-review
1
Citation
(Scopus)