Composition profiles and adhesion evaluation of conductive diamond coatings on dielectric ceramics

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@article{45936c02584642739af04fd4678be0a0,

title = "Composition profiles and adhesion evaluation of conductive diamond coatings on dielectric ceramics",

keywords = "Secondary ion mass spectrometry, Silicon nitride, Adhesion, Nanocrystalline diamond, Boron doping",

author = "Teodoro, {Orlando Manuel Neves Duarte}",

year = "2012",

month = jan,

day = "1",

doi = "10.1016/j.tsf.2012.03.049",

language = "Unknown",

volume = "520",

pages = "5260--5266",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

number = "16",

}

TY - JOUR

T1 - Composition profiles and adhesion evaluation of conductive diamond coatings on dielectric ceramics

AU - Teodoro, Orlando Manuel Neves Duarte

PY - 2012/1/1

Y1 - 2012/1/1

KW - Secondary ion mass spectrometry

KW - Silicon nitride

KW - Adhesion

KW - Nanocrystalline diamond

KW - Boron doping

U2 - 10.1016/j.tsf.2012.03.049

DO - 10.1016/j.tsf.2012.03.049

M3 - Article

SN - 0040-6090

VL - 520

SP - 5260

EP - 5266

JO - Thin Solid Films

JF - Thin Solid Films

IS - 16

ER -