Compact gate valve for UHV

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Abstract

A compact gate valve for UHV is described. The valve was designed to allow isolation of the ion source volume of an ion gun used in a surface analysis system. Therefore, filaments can be replaced without ultra-high vacuum loss in the analysis chamber. Other applications for this valve are suggested. The valve has been built inside a DN40CF flange. Operation of the valve is done by a linear actuator. Differential pumping is possible with the use of a Tee in the actuator connection. The construction details are described and the testing results are presented.

Original languageEnglish
Pages (from-to)87-90
Number of pages4
JournalVacuum
Volume64
Issue number1
DOIs
Publication statusPublished - 28 Nov 2001

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