Compact gate valve for UHV

O. M. N. D. Teodoro; A. M. C. Moutinho

doi:10.1016/S0042-207X(01)00379-7

Compact gate valve for UHV

O. M. N. D. Teodoro, A. M. C. Moutinho

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

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Abstract

A compact gate valve for UHV is described. The valve was designed to allow isolation of the ion source volume of an ion gun used in a surface analysis system. Therefore, filaments can be replaced without ultra-high vacuum loss in the analysis chamber. Other applications for this valve are suggested. The valve has been built inside a DN40CF flange. Operation of the valve is done by a linear actuator. Differential pumping is possible with the use of a Tee in the actuator connection. The construction details are described and the testing results are presented.

Original language	English
Pages (from-to)	87-90
Number of pages	4
Journal	Vacuum
Volume	64
Issue number	1
DOIs	https://doi.org/10.1016/S0042-207X(01)00379-7
Publication status	Published - 28 Nov 2001

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10.1016/S0042-207X(01)00379-7Licence: CC BY-NC-ND

Compact gate valve for UHVAccepted author manuscript, 1.17 MBLicence: CC BY-NC-ND

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title = "Compact gate valve for UHV",

abstract = "A compact gate valve for UHV is described. The valve was designed to allow isolation of the ion source volume of an ion gun used in a surface analysis system. Therefore, filaments can be replaced without ultra-high vacuum loss in the analysis chamber. Other applications for this valve are suggested. The valve has been built inside a DN40CF flange. Operation of the valve is done by a linear actuator. Differential pumping is possible with the use of a Tee in the actuator connection. The construction details are described and the testing results are presented.",

author = "Teodoro, {O. M. N. D.} and Moutinho, {A. M. C.}",

note = "The authors acknowledge the Portuguese Foundation for Science and Technology for the financial support to this work. It was partially supported through the project PRAXIS 3/31/MMA/1764/95.",

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AU - Teodoro, O. M. N. D.

AU - Moutinho, A. M. C.

N1 - The authors acknowledge the Portuguese Foundation for Science and Technology for the financial support to this work. It was partially supported through the project PRAXIS 3/31/MMA/1764/95.

PY - 2001/11/28

Y1 - 2001/11/28

N2 - A compact gate valve for UHV is described. The valve was designed to allow isolation of the ion source volume of an ion gun used in a surface analysis system. Therefore, filaments can be replaced without ultra-high vacuum loss in the analysis chamber. Other applications for this valve are suggested. The valve has been built inside a DN40CF flange. Operation of the valve is done by a linear actuator. Differential pumping is possible with the use of a Tee in the actuator connection. The construction details are described and the testing results are presented.

AB - A compact gate valve for UHV is described. The valve was designed to allow isolation of the ion source volume of an ion gun used in a surface analysis system. Therefore, filaments can be replaced without ultra-high vacuum loss in the analysis chamber. Other applications for this valve are suggested. The valve has been built inside a DN40CF flange. Operation of the valve is done by a linear actuator. Differential pumping is possible with the use of a Tee in the actuator connection. The construction details are described and the testing results are presented.

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DO - 10.1016/S0042-207X(01)00379-7

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JF - Vacuum

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Compact gate valve for UHV

Abstract

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